High load piezo positioner series nanoX 2000 pages
rs piezosyszemjena
SJ incredibly precise
I nanoX 200 series
High speed piezo translation stages
concept:
The one-axis linear positioning stages nanoX
200 are a development within the ultra-fast
nanoX®-line. Due to FEA-optimization these
stages achieve the highest dynamical per-
formance and excellent guiding accuracy
even under high loads.
The positioning stages of the nanoX 200
series are temperature compensated - while
changing the environmental temperature the
stage keeps its position.
specials:
The highest positioning accuracy, stability,
linearity and reproducibility are achieved in
closed loop operation when used in combi-
nation with the high resolution capacitive
direct measuring feedback system from
piezosystem jena.
mounting:
The raster tapped and thru holes allow easy
integration of the stage into any application
or mechanical setup.
image: nanoX 200
product highlights:
• 240|am range of motion
• highest dynamical performance
• excellent guidance accuracy
• 0.4 nm resolution
• 0 3mm central aperture
• vacuum and cryogenic versions available
• body material variations of invar,
superinvar, aluminium or titanium available
• external sensor preamplifier optional
applications:
• machine tools
• laser optics
• life science
• scanning systems
Tel: +49 (3641) 66880 • Fax: +49 (3641) 668866
info@piezojena.com • http://www.piezosystem.de
nanoX 200 ds Rev05 2013 10 24.doc
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