x-axis positioning stage PX 3000 pages

PX 200 • PX 300 • PX 400
compact 1-axis translation stage
Concept:
The systems of the series PX 200, PX 300 and
PX 400 are ideally suited for nm-precise
positioning of optic components such as mirrors
and laser diodes, adjustment and mounting in
semiconductor technologies and electronics, and
applications in measurement technologies and
quality assurance as well as microbiology.
The series PX consist of piezo electrical actuator
in stage design with a solid top and bottom plate
for easily integration in optical setups. The
monolithic flexure hinges design offers high
precision motion range, high stiffness and in due
of this excellent dynamical performance for
extremely fast and accurate positioning tasks

Specials:
The systems of this series are available in
vacuum
and
cryogenic
temperature
configurations.
As an option they may come equipped with strain
gage or capacitive position sensors, depending on
the system configuration, to achieve very accurate
repeatability in the low nanometer range.

Interfaces:
The elements of the series PX 200 up to PX 400
are actuators integrated with an inner lever
transmission in housing. Since the lever
mechanism works in both directions, pulling
forces between bottom and top plate need to be
avoided, as they could damage the stage. The
stage is fixed to a base plate.
Components can be mounted on the top plate by
two threaded diagonal holes and can be
accurately affixed using the precise pin holes.

Tel: +49 (3641) 66880 • Fax: +49 (3641) 668866
info@piezojena.com • http://www.piezosystem.com
PX_200_300_400_ds_Rev04_2015-03-12.doc

image: PX 400

Product highlights:
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accurate parallel motion
up to 400µm motion range
without mechanical play
easily combined with other piezo
electrical systems
precison pin holes for accurate
adjustment
high dynamic range

Applications:
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fiber positioning
beam alignment
semiconductor
micro manipulation