series nanoSX 4000 pages

nanoSX 400
High speed piezo translation stages
Positionierer

Concept:

The nanoSX 400 translation stage offers a large
travel range, a central aperture and temperature
compensation in a compact design. A high stiffness
and trajectory trueness even at higher loads are
major advantages compared to competitive systems
available on the market.

Image: nanoSX 400

Vacuum and cryogenic versions are available on
demand as well as body material variations of invar,
super invar, aluminum or titanium.

Product highlights:

Specials:
The nanoSX 400 systems can be easily combined to

a system with a longer travel range or to a two axes
system. For more information please contact our
staff.
An optional external sensor preamplifier (version
“EXTERN”/“DIGITAL”)

offers

independence

from

cable length.

Mounting:

travel range 450/400 µm open/closed
loop

sub-nm resolution

12.5 mm central aperture

high load capability

Application examples:

nano positioning

The raster tapped and thru holes allow easy

scanning

integration of the nanoSX 400 into any application

surface analysis

or mechanical setup.

metrology

alignment

Options:

info@piezojena.com • http://www.piezosystem.com
nanoSX_400_ds_Rev05_2015_01_14_MKr.doc

cryogenic temperatures

phone: +49 (3641) 66880 • fax: +49 (3641) 668866

vacuum version
special materials