x-axis nanopositioning stage PX 1000 pages

PX 100
compact 1-axis translation stage
Concept:
The systems of the series PX 100 are ideally
suited for nm-precise positioning of optic
components such as mirrors and laser diodes,
adjustment and mounting in semiconductor
technologies and electronics, and applications in
measurement technologies and quality assurance
as well as microbiology.
The series PX consist of piezo electrical actuator
in stage design with a solid top and bottom plate
for easily integration in optical setups. The
monolithic flexure hinges design offers high
precision motion range, high stiffness and in due
of this excellent dynamical performance for
extremely fast and accurate positioning tasks

Specials:
The systems of this series are available in
vacuum
and
cryogenic
temperature
configurations.
As an option they may come equipped with strain
gage or capacitive position sensors, depending on
the system configuration, to achieve very accurate
repeatability in the low nanometer range.

Interfaces:
The elements of the series PX are actuators
integrated with an inner lever transmission in
housing. Since the lever mechanism works in both
directions, pulling forces between bottom and top
plate need to be avoided, as they could damage
the stage. The stage is fixed to a base plate.
Components can be mounted on the top plate by
two threaded diagonal holes and can be
accurately affixed using the precise pin holes.

info@piezojena.com • http://www.piezosystem.com
PX_100_ds_Rev05_2013-01-24.doc

image: PX 100

Product highlights:
accurate parallel motion
up to 100µm motion range
without mechanical play
easily combined with other piezo
electrical systems
precison pin holes for accurate
adjustment
high dynamic range
Applications:
fiber positioning
beam alignment
semiconductor
micro manipulation