5 axis piezo positioner PENTOR0 pages

PENTOR – 5-axis system
The PENTOR a piezo-electric stage was developed to meet the requirements of linear
movement in three axes while at the same time
being able to provide tip and tilt motion.
With 5 different degrees of freedom, 100 µm in
XYZ axes, and ±2 mrad in ʘX and ʘY axes, the
PENTOR provides a spatial positioning flexibility
to fulfill complex tasks.
PENTOR 100 SG

The PENTOR is equipped with a 17mm diameter open aperture that makes it ideal for optical
setups.
Due to the high stiffness, this element is able to
offer a high resonant frequency. Therefore the
PENTOR is very suitable for dynamic applications.

Product highlights:
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combination of a three axis translation
system and a two axis tilting system

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free center hole with 17 mm diameter

and closed loop versions. The closed loop ver-

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integrated preload

sion is equipped with strain gage sensors to

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translation each axis: 100 µm

overcome drift and hysteresis.

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tilt each direction: ±2 mrad

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solid state flexure hinges in parallelo-

The 5-axes piezo stage is available in both open

gram design without mechanical play

Vacuum and low temperature versions are also
available upon request.

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optional measurement system
vacuum and low temperature versions
available

Application examples:
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dynamical applications

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laser tuning

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Pentor_rev3_ds_2014_12_01.doc

micro and nano positioning

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info@piezojena.com • http://www.piezosystem.com

scanning system

life science