TRITOR 101 and 1020 pages

TRITOR 101 and TRITOR 102
3D piezo positioning stages
with central opening
Concept:
The piezo 3D stage series TRITOR 101 and 102
are extremely compact and offer motions of up to
100 µm in XYZ direction. The unique cube like
mechanical design allows motion without play.
They are well suited for many applications
reaching from optical research to OEM systems.
Probe alignment in microscopes usually requires
an open center space (e. g. for the passage of
light). The 3D piezo stage models TRITOR 101
and 102 with their central apertures of 30 mm and
40 mm were developed considering such
applications. High stiffness, in combination with
excellent straightness of motion, make the
TRITOR series ideal for high precision in the nano
meter range for optics, laser–technique, and any
other type of high resolution positioning
application.

Specials:
Piezo electrical actuators can act much faster,
and with a higher accuracy to a signal change,
than any motorized drive available. Each axis can
be controlled separately in closed loop mode. An
integrated sensor system is an available option
that guarantees accuracy in the nanometer range.
The simultaneous motion, available in XYZ
directions, offers a large degree of freedom during
use. All stages of the TRITOR series can be
made with special materials for extraordinary
applications such as vacuum or cryogenic
applications.

Assembling:
The stages are designed to be mounted, by the
use of two through holes located diagonal from
each other. Components can be mounted on the
top plate by two diagonal tapped holes and can
be accurately located by using the precision pin
holes.
Tel: +49 (3641) 66880 • U.S. (+1) 508 634 6688
info@piezojena.com • http://www.piezosystem.com
TRITOR_101-102_ds_Rev02_2014_07_31.doc

Image: TRITOR 102

Product highlights:

3D nano positioning stage
central opening (up to 40 mm)
XYZ motion range 100 µm
optional integrated feedback sensors
motion without mechanical play
highest positioning resolution
stage design for microscopy platforms
high resonant frequency precise for
line scanning application

Application:

AFM and Microscopy
Micromanipulation
Cantilever adjustment
Probe Scanners
Wafer stepper and lithographic