series nanoSXY 1200 pages

nanoSXY 120
Ultra fast XY piezo positioning stage
Positionierer

Concept:

The nanoSXY 120 offers a long travel scanning
range, combined with a central aperture of 12.5 mm
in a compact design. Dynamic performance with a
high load capacity, supreme stiffness and a high
resonant frequency are major advantages of the
nanoSXY 120. The nanoSXY 120 is also available

Image: nanoSXY 120, vacuum version

with a capacitive measurement system.
The FEA designed actuating system based on flexure
hinges guarantees excellent guidance accuracy
without parasitic motion.
The durability of the nanoSXY 120 makes this series

Product highlights:

loop

of stages an excellent choice for permanent use in
industrial applications.

Specials:
The bi-directional gear design makes the system
very robust and makes it non-sensitive against external forces.
Vacuum and cryogenic versions are available on

travel range 120/100 µm open/closed

sub-nm resolution

excellent guidance accuracy

high Z-axis stiffness

12.5 mm central aperture

compact design

Application examples:

Mounting:

nano positioning

scanning
microscopy

metrology

super invar, aluminum or titanium.

demand as well as body material variations of invar,

alignment

The nanoSXY 120 can easily be fixed via four rectangular arranged through holes into any application or mechanical setup.

Options:

info@piezojena.com • http://www.piezosystem.com
nanoSXY_120_ds_Rev01_2015_01_16_MKr.docx

cryogenic version

phone: +49 (3641) 66880 • fax: +49 (3641) 668866

vacuum version
special material