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Brochure - Stiletto Scanning-Laser Particle Detector 0 pages
Stiletto is a breakthrough vacuum in situ particle
detector that finds yield-limiting contamination in real
time on every wafer with scanning-laser sensitivity and
accuracy. An easy-to-use interface with the INFICON
FabGuard® Sensor Integration and Analysis System
enables synchronized data collection and diagnostics
for real-time Advanced Process Control, wafer yield
improvement, and increased tool productivity for the most
demanding semiconductor applications.
SCANNING FOR
GREATER SENSITIVITY
Stiletto’s resonant scanning-laser continuously monitors
a large volume of the process chamber or vacuum
pumping line and is able to provide statistically significant
count rates for process control. Superior noise rejection
and fast signal processing speed provide Stiletto with
unprecedented accuracy and count rate for demanding
processes. This combination of cutting-edge technologies
delivers submicron sensitivity that detects “killer particles”
while avoiding nuisance events. So you get reliable fault
detection for every wafer, every run, every time.
ACCURATE TIME RESOLUTION
SPEEDS RECOVERY
Stiletto is the first particle monitoring system to be fully
integrated with the process tool and its data. When
combined with FabGuard, the particle counts can be
overlaid with equipment parameters to allow engineers to
identify the exact timing and cause of particle formation
(Fig. 1). This reduces tool downtime and improves
productivity.
MINIMIZE YIELD EXCURSIONS
Stiletto's ability to detect particles during every run of
every wafer provides unprecedented protection against
defect-induced yield loss. Alarm levels can be set within
FabGuard to provide a shutdown limit for the tool (Fig. 2).
This prevents further wafer processing when high levels
of particles are present.
R E A L-T I ME I N S ITU PA RT I CLE MO N I TO R I NG
FO R M A X I MUM Y I E LD
Stiletto®
Scanning-Laser Particle Detector
Figure 1 - FabGuard screenshot shows Stiletto particle counts
versus gas flows in an HDP CVD clean process.
