Crystal 12 Sensor0 pages
Crystal 12® Sensor
for Quartz Crystal Deposition Controllers
AUTO CRYSTAL SWITCHING MAXIMIZES PRODUCTION TIME
The low-density materials and low deposition rates
designed specifically for OLED manufacturing. With its
associated with OLED processes demand extraordinary
patented ModeLock™ measurement system, Cygnus 2
accuracy and reliability from thin film deposition controllers
delivers the most stable thickness measurement and the
and sensors. To maintain rate and thickness accuracy,
most precise rate resolution available. Up to six sources
continuous rate control is necessary.
can be controlled simultaneously, independently, or in any
The INFICON Crystal 12 Sensor replaces its crystals
combination. This means Cygnus 2 can maximize through-
automatically without interrupting your process, when
partnered with the INFICON Cygnus 2 , IC6, XTC/3 and
™
put for the most complex, demanding, and unique OLED
applications.
SQC-310* thin film deposition controllers. Whenever a
crystal becomes unstable or fails, Cygnus 2 signals the
Crystal 12 sensor carousel to immediately rotate a new
crystal into position, for continuous deposition rate moni-
FEATURES AT A GLANCE
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toring. To further minimize downtime, crystals can be
preloaded into a second optional carousel, which can
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then be quickly and easily exchanged with the carousel
containing the exhausted crystals, minimizing the time the
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system is open.
MAKE THE MOST OF CRYSTAL 12
WITH CYGNUS 2 THIN FILM
DEPOSITION CONTROLLERS
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You will get the greatest benefit from the Crystal 12
sensor when you use it with the INFICON Cygnus 2
thin film deposition controller.
Developed by INFICON—the market leader in thin film
instrumentation—Cygnus 2 is the only thin film controller
*Position feedback not available with SQC-310
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Holds 12 crystals with robust, automatic switching
to maximize process uptime
Easy-to-remove carousel allows fast replacement
of all 12 crystals
Stable crystal temperature, because crystal switching
is pneumatically-driven (competitive units use heatgenerating motors)
Easy-to-remove front deposition shield protects the
crystals and carousel from material accumulation,
minimizing the need to remove entire sensor for
maintenance
Optional mounting-post kit can be user-modified to
accommodate metric hardware
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