عضویت 
ورود اعضا
راهنمای خرید
Brochure - Cygnus Thin Film Deposition Controller 0 pages
Maximize throughput in oled applications
Cygnus is the only thin film deposition controller designed specifically for OLED manufacturing. Features important to OLED production allow Cygnus to meet the needs of the most complex, demanding, and unique OLED applications. The patented ModeLock measurement system, available on all INFICON deposition controllers, gives Cygnus the most stable, highest resolution rate and thickness measurement
available. OLED manufacturers now have a reliable controller with features essential for maximizing production throughput.
CO
MPREHENSIVE PROCESSPROCESS CONTROLCONTROL
With its extensive capabilities, Cygnus can initiate
pumpdown, control valves, activate substrate heaters, etc. This enhanced functionality may eliminate the need for ancillary instruments, reducing system complexity and cost. Cygnus offers up to twelve assignable analog outputs for simultaneous rate control from up to six sources or for rate or thickness tracking and system integration. Cygnus logic and process control capabilities include 100 programmable logic statements, 20 counters, and 20 timers. I/O and TTL relay boards provide up to 24 relay outputs, 28 TTL inputs, and 14 TTL outputs. The logic statements can be used in conjunction with external inputs or outputs. Each statement can include up to five functions and can be linked using Boolean logic.
Maximize Throughput in OLED Applications
Key FEATURES / Benefits
¡ Up to 6 source co-deposition —as many as 6 sources can be controlled simultaneously, independently, or in any combination.
One Cygnus controller can do what used to take two or three controllers, lowering the cost of ownership.
¡ Multiple measurement averaging—each control channel can be averaged over multiple measurements, providing the increased rate resolution (to 0.0006 Å/s with 10 second averaging) necessary when depositing very low rates.
¡ Display resolution to 0.001 Å/s—the target control rate can be entered to 0.001 Å/s, necessary when controlling low dopant rates.
¡ Non-deposit rate control—the source material can be kept under continuous rate control as substrates are cycled through the deposition chamber. This saves time by eliminating
the need to reheat source material with every substrate
¡ Flexible deposition sequencing—as substrates are cycled through the deposition chamber, the deposition sequence can be toggled between deposit and non-deposit rate control.
This exposes the substrate to the deposition material only when needed.
¡ Thickness summing—often OLED materials must be deposited
at low rates. Summing the thickness from two or more sources of the same material allows reduced Takt time.
¡ Auto Z*—Z-ratios for organic materials are not well known. Using INFICON Auto Z can improve thickness accuracy by automatically determining the Z-ratio.
¡ Cygnus Editor Applications Software—large production systems will have multiple Cygnus controllers. The Cygnus Editor Applications Software allows multiple Cygnus controllers
to be programmed and monitored from a single PC.
Cygnus®
Thin Film Deposition Controller
*Auto Z—U.S. patent #5,112,642
