Datasheet - VAH DN16-63 CF-R 0 pages
ORDERING INFORMATION
SPARE PARTS
SPECIFICATIONS
SELECTION DATA
STANDARD
DN 16-63
Manually Actuated Angle Valves
with CF-Flanges ( VAH )
For UHV and HV applications
Bakeable at up to 180°C in open and closed position
FPM sealed
Maintenance-free
ALL-METAL
For UHV applications
Bakeable at up to 300°C in open and closed position
Copper sealed
Maintenance-free
STANDARD ALL - METAL
Vacuum connection DN16 CF-R DN40 CF-R DN 63 CF-R DN16 CF-R DN40 CF-R DN 63 CF-R
Tightness mbar l/s 1 X 10-10 1 X 10-10 1 X 10-10 5 X 10-11 5 X 10-11 5 X 10-11
Bakeout temperature w/o hand wheel °C 180 180 180 300 300 300
Type VAH016-Z VAH040-Z VAH063-Z VAH016-U VAH040-U VAH063-U
Part No. 250-731 250-736 250-741 250-730 250-735 250-740
Service life cycles 50 000 50 000 50 000 1000 1000 1000
Conductance for molecular flow l/s 3 38 100 3 38 100
Pressure (absolute) min. / max. mbar/bar 1 x 10-9 / 4 1 x 10-9 / 4 1 x 10-9 / 4 1 x 10-10 / 4 1 x 10-10 / 4 1 x 10-10 / 4
Tightening torque Nm 1 1.8 2.5 8 … 10 20 … 40 30 … 60
Heating and cooling rate °C/min — — — 4 4 2
Bellows, stainless steel AISI/DIN 321/1.4541 321/1.4541 321/1.4541 321/1.4541 321/1.4541 321/1.4541
Housing, stainless steel AISI/DIN 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301
welded welded welded welded welded welded
Valve plate, seal FPM FPM FPM copper copper copper
Valve plate, stainless steel AISI/DIN 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301
Weight kg 0.35 1.8 4.8 0.4 2.0 5.0
FPM seal, 10 pieces Part No. 215-341 215-342 215-343 — — —
Copper seal, 2 pieces Part No. — — — 215-344 215-345 215-346