FabGuard FDC0 pages
FabGuard IPM TIGHTENS
PROCESS CONTROL WITH
INTEGRATED PROCESS
MONITORING
Semiconductor manufacturing is becoming
increasingly dependent on in situ sensors to
help maintain tighter process control. These
sensors provide a wealth of specific process
M a n a g e a P r o c e s s , a To o l , o r Yo u r E n t i r e F a b
information that correlates very strongly with
wafer outcome and perfectly complements the
tool’s own data. INFICON pioneered the use
of sensors as integrated process monitors
(IPM) in microelectronic production.
FabGuard IPM is the only system designed
to integrate multiple types of process sensors
(RGA, CPM, in situ particle monitors, RF
The Alarm Pareto report provides concise information on tool performance and
makes it easy to identify the most common problems.
sensors, arc detectors) in a single platform,
automatically controlling all sensors and
analyzing their complex data. That brings
maintenance personnel locate and correct the problem faster. The FabGuard
the benefits of in situ sensors to FDC without
FDC system’s comprehensive database also provides an overview of the health
requiring user expertise. It also eliminates
of the tool and the process, keeping preventive maintenance personnel in tune
multiple hardware boxes and software
with tool performance and reducing unscheduled tool downtime.
systems (and their high support costs).
PINPOINT PROBLEMS TO
MINIMIZE WAFER LOSS AND TOOL
DOWNTIME
UNMATCHED EXPERIENCE AND SUPPORT MAKE INFICON
THE RIGHT CHOICE
INFICON residual gas analyzers, optical sensors, thin film monitors/controllers,
vacuum gauges and helium leak detectors are used in fabs throughout the
If a process excursion does occur, FabGuard
world to make processes more precise, productive and reliable. Our experience
IPM can immediately activate an alarm
in developing both leading-edge sensors and software puts us in a strong
or alert the appropriate person, then shut
position to integrate various data sources and use the data in much more
down the tool before additional wafers are
powerful ways than can be achieved by handling the data from each source
misprocessed. FabGuard IPM also classifies
separately. The highly trained people in our global network of sales and
the fault by labeling the analysis, thereby
service offices will be with you at each step, from helping you determine how
creating a tool- or process-specific library of
the FabGuard FDC system can best meet your needs, through installation,
faults. This minimizes downtime by helping
to providing responsive, ongoing support.
www.in fico n .c o m
reachus@inf icon.com
FabGuard is a registered trademark of INFICON.
Due to our continuing program of product improvements, specifications are subject to change without notice.
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©2007 INFICON
FabGuard® FDC
Fabwide Fault Detection and Classification