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STC Product Line Card 20140 pages
Gas Analyzers, Mass Spectrometers, RF Detectors,
and Sensor Integration Software
Transpector MPH Residual Gas Analyzer
®
n
U
ltrafast data collection
(1 ms measurement time)
n
N
ine-decade dynamic range
n
M
DPP of <5E-15 Torr
n
T
CP/IP Ethernet connectivity
n
I
ncreased Signal-to-Noise ratio
n
Dual filaments
n
I
nterchangeable sensors and electronics
n
F
ield replaceable Electron Multiplier
n
C
ombined anode, cathode and
repeller filament kit
n
n
n
S
ensors are assembled, tested and double
bagged in a clean room environment
RoHS compliant
S
horter sensors minimize installed footprint
Transpector CPM Compact Process Monitor
n
n
n
n
Q
uadrupole-based gas analysis system for
monitoring complex processes
A
llows 24/7 monitoring to maximize yield and
throughput, thereby minimizing costs
C
ompact and affordable enough to be installed
on every high-pressure vacuum chamber
HexBlock™ sampling system maximizes
performance
n
n
n
n
B
uilt-in CDG for process pressure monitoring and
vacuum interlock
O
ptional calibration reference available for tuning
and gas reference
L
ong-life closed ion source permits contaminant
detection at sub-ppm levels while resisting most
corrosive and reactive gases
L
ightweight and easily transportable
QMG 700 Analytical Mass Spectrometer
n
n
n
H
igh resolution across entire mass range:
1-2048 amu
n
D
ynamic range of nine orders of magnitude
Minimum detectable partial pressures in the
10E-16 mbar range
M
odular design is ideal for customizing to
application needs. Various ion source,
ion optics, mass filter, and detector options
are available.
Transpector XPR3/ XPR3L Gas Analysis System
n
n
n
E
M works at PVD process pressures,
providing faster, cleaner data collection and
eliminating FC to EM transitions for easier
interpretation of data.
P
rovides economical dual-purpose functionality,
process monitoring and base vacuum assurance,
by operating from UHV up to 10 mTorr
(20 mTorr optional)
A
ffordable cost-effective process monitor that
enables implementation in scaleable production
designs
n
n
n
I
mproves process yield, reduces scrap and
improves product quality through continuous
automatic monitoring of process gas pressures,
ratios and possible contaminants or impurities
O
perates across a 1 to 100 amu mass range,
protecting your investment and reducing risk
by having the ability to detect a broad range of
materials, contaminants or byproducts
C
ompatible with the FabGuard monitoring and
analysis system to provide reliable advanced
diagnostics and process control
