SL52000 pages
SERIES SL 5200
MINI SPRINGLESS REGULATOR
Small size packed with performance
Operating Parameters
• Single stage
• Stainless steel 316L VAR
secondary remelt
construction
capacity standard, 200 sccm
to 130 slpm with HF option
vacuum to 150 psig (10 bar)
100 mm Hg absolute to 10 psig (0.7 bar)
0.5 to 30 psig (0.034 to 2 bar)
1 to 100 psig (0.07 to 7 bar)
500 psig (34 bar)
1,000 psig (69 bar)
• Vacuum to 150 psig
(10 bar) inlet
• Point of use regulation at
its finest
Other Parameters
Inlet/outlet connectors
Flow coefficient (Cv)
Internal volume
Operating temperature
Surface finish
• Surface mount (IGS) and
custom configurations
available
• Ultraclean technology
backed by service and
support
• Installation and operating
instructions available at
www.aptech-online.com
in the Tech Briefs section
1/4 or 3/8 inch face seal or tube weld
0.07 (HF option 0.15)
0.19 in3 (3.1 cm3)
-40° to +160°F (-40° to +71°C)
10 µin. (0.25 µm) Ra max standard;
Inboard leakage
Outboard leakage
Leakage across seat
Supply pressure effect
2 x 10-10 sccs
2 x 10-9 sccs He at 100 psig inlet pressure
4 x 10-8 sccs He at 100 psig inlet pressure
0.20 psig per 20 psig source pressure change
0.50 psig per 20 psig source pressure change
7 µin (0.18 µm); and 5 µin (0.13 µm) optional
HF
Materials
Type of Service
Wetted Parts
Body
Poppet
Finish
Seat
Series SL 5200 S
Noncorrosive
Series SL 5200 SH
Corrosive
SS 316L secondary remelt
SS 316L
electropolished and passivated
PCTFE (Polyimide optional)
ENGINEERING DATA — SERIES SL 5200 MINI SPRINGLESS REGULATOR
• 1 sccm to 30 slpm flow
Source pressure
Delivery pressure SL 5201A
SL 5202
SL 5210
Proof pressure
Burst pressure
SS 316L secondary remelt
Ni-Cr-Mo alloy / UNC N06022
electropolished and passivated
PCTFE
All specifications subject to change without notice.
687 TECHNOLOGY WAY NAPA, CA 94558 • (707) 259-0102 • FAX (707) 259-0117
www.aptech-online.com
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