AP 27000 pages
SERIES AP 2700
TWO-STAGE, TIED DIAPHRAGM REGULATOR
High Flow — High Inlet Pressure
Operating Parameters
• Regulator of choice for
NF3 and H2 BSGS delivery
of intermediate flows
• Flow rates to 150 slpm of
vacuum to 3,500 psig (241 bar)
1 to 30 psig (0.07 to 2 bar)
2 to 60 psig (0.14 to 4 bar)
2 to 100 psig (0.14 to 7 bar)
3 to 120 psig (0.21 to 8 bar)
200 psig (14 bar) nominal
4,000 psig (276 bar)
8,000 psig (552 bar)
• Two stage pressure
reduction eliminates
supply pressure effect
Other Parameters
Inlet/outlet connectors
Bonnet port
Flow coefficient (Cv)
Internal volume
Operating temperature
Surface finish
• Surface finish
15 Ra max /10 Ra avg
(10, 7 & 5 Ra max options)
• Vacuum to 3,500 psig
(241 bar) inlet
• Installation and operating
7 µin (0.18 µm); and 5 µin (0.13 µm) Ra max optional
2 x 10-10 sccs
2 x 10-9 sccs He at 1,500 psig inlet pressure
4 x 10-8 sccs He at 1,000 psig inlet pressure
panel (optional)
0.01 psig per 100 psig source pressure change
Materials
Type of Service
Wetted Parts
Body
Poppet, nozzle and diaphragm
Finish
Seat
Series AP 2700 S
Noncorrosive
Series AP 2700 SH
Corrosive
SS 316L secondary remelt
SS 316L/Ni-Cr-Mo alloy / UNS N06022
electropolished and passivated
PCTFE (Polyimide optional)
TWO STAGE REGULATOR
instructions available at
www.aptech-online.com
in the Tech Briefs section
Inboard leakage
Outboard leakage
Leakage across seat
Installation
Supply pressure effect
1/4 or 3/8 inch face seal or tube weld
1/8 inch NPT
0.105
1.87 in3 (30.6 cm3)
-40° to +160°F (-40° to +71°C)
15 µin Ra max / 10 µin. Ra avg.
(0.4/0.25 µm) standard; 10 µin (0.25 µm);
ENGINEERING DATA — SERIES AP 2700
NF3 and 900 slpm of H2
(based upon minimum
inlet pressure of 200 psig
(14 bar)
Source pressure
Delivery pressure AP 2702
AP 2706
AP 2710
AP 2712
First stage pressure
Proof pressure
Burst pressure
SS 316L secondary remelt
Ni-Cr-Mo alloy / UNS N06022
electropolished and passivated
PCTFE
All specifications subject to change without notice.
Note: AP Tech recommends monitoring the intermediate pressure (first stage outlet/second stage inlet) for safety. Please refer to product note 409 for
further information.
687 TECHNOLOGY WAY NAPA, CA 94558 • (707) 259-0102 • FAX (707) 259-0117
www.aptech-online.com
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