AZ 10000 pages

SERIES AZ 1000
SINGLE STAGE REGULATOR
Flow Rates to 120 slpm

• SS 316L construction
• 10 µin. surface finish
(25 µin. optional)

• Vacuum to 3500 psig
(241 bar) inlet
bar) outlet

Source pressure
AZ 1001 and TF option
Delivery pressure
AZ 1001
AZ 1002
AZ 1006
AZ 1010
AZ 1015
Proof pressure
Burst pressure

vacuum to 3,500 psig (241 bar)
vacuum to 300 psig (21 bar)
1 to 10 psig (0.07 to 0.7 bar)
1 to 30 psig (0.07 to 2 bar)
2 to 60 psig (0.14 to 4 bar)
2 to 100 psig (0.14 to 7 bar)
5 to 150 psig (.34 to 10 bar)
5,000 psig (345 bar)
10,000 psig (690 bar)

• Cleaned, assembled and
packaged for high purity
semiconductor
applications

• Flow rates
- Standard to 30 slpm
- HF option to 120 slpm

• Regulator of choice for
point of use applications

• Installation and operating
instructions available at
www.aptech-online.com
in the Tech Briefs section

Materials
Wetted Parts
Body, nozzle
Poppet, diaphragm
Finish
Seat

Other Parameters
Inlet/outlet connectors
Flow coefficient (Cv)
Internal volume
Operating temperature
Surface finish

Inboard leakage
Outboard leakage
Leakage across seat
Installation
Supply pressure effect

1/4 or 3/8 inch face seal or tube weld
0.09 (0.15 HF option)
0.49 in3 (8 cm3)
-40° to +160°F (-40° to +71°C)
10 µin. (0.25 µm) Ra avg. standard
25 µin. (0.62 µm) Ra avg. optional
2 x 10-10 sccs
2 x 10-9 sccs He
4 x 10-8 sccs He
surface or panel (optional)
0.25 psig per 100 psig source pressure change
0.75 psig per 100 psig source pressure change

HF

Series AZ 1000 S

Series AZ 1000 SHP

SS 316L*
SS 316L
electropolished and passivated
PCTFE (Polyimide and PTFE optional)

ENGINEERING DATA — SERIES AZ 1000 SINGLE STAGE REGULATOR

• 1 to 150 psig (0.07 to 10

Operating Parameters

SS 316L*
Ni-Cr-Mo alloy / UNS N06022
electropolished and passivated
PCTFE (PTFE optional)

All specifications subject to change without notice.
* Please refer to product note PN 414 regarding single melt 316L SS material

687 TECHNOLOGY WAY NAPA, CA 94558 • (707) 259-0102 • FAX (707) 259-0117

www.aptech-online.com