AZ 15000 pages
SERIES AZ 1500
TIED DIAPHRAGM REGULATOR
Low Flow — High Pressure
• SS 316L construction
• 10 µin. surface finish
(25 µin. optional)
• Vacuum to 3500 psig
Source pressure
Delivery pressure AZ 1502
AZ 1506
AZ 1510
AZ 1515
Proof pressure
Burst pressure
vacuum to 3,500 psig (241 bar)
HR option vacuum to 4,500 psig (310 bar)
1 to 30 psig (0.07 to 2 bar)
2 to 60 psig (0.14 to 4 bar)
2 to 100 psig (0.14 to 7 bar)
5 to 150 psig (.34 to 10 bar)
150% of maximum rating
400% of maximum rating
• 1 to 150 psig (0.07 to
10 bar) outlet
• Cleaned, assembled and
packaged for high purity
semiconductor
applications
• Regulator of choice for
low flow source cabinet
applications
• Installation and operating
instructions available at
www.aptech-online.com
in the Tech Briefs section
Materials
Wetted Parts
Body, nozzle
Poppet, diaphragm
Finish
Seat
Other Parameters
Inlet/outlet connectors
Flow coefficient (Cv)
Internal volume
Operating temperature
Surface finish
Inboard leakage
Outboard leakage
Leakage across seat
Installation
Supply pressure effect
1/4 or 3/8 inch face seal or tube weld
0.09
0.51 in3 (8.4 cm3)
-40° to +160°F (-40° to +71°C)
10 µin. (0.25 µm) Ra avg. standard
25 µin. (0.62 µm) Ra avg. optional
2 x 10-10 sccs
2 x 10-9 sccs He
4 x 10-8 sccs He
surface or panel (optional)
0.25 psig per 100 psig source pressure change
Series AZ 1500 S
Series AZ 1500 SHP
SS 316L*
SS 316L
electropolished and passivated
PCTFE (Polyimide optional)
SS 316L*
Ni-Cr-Mo alloy / UNS N06022
electropolished and passivated
PCTFE
ENGINEERING DATA — SERIES AZ 1500 TIED DIAPHRAGM REGULATOR
(241 bar) inlet
HR option to 4,500 psig
(310 bar)
Operating Parameters
All specifications subject to change without notice.
* Please refer to product note PN 414 regarding single melt 316L SS material.
687 TECHNOLOGY WAY NAPA, CA 94558 • (707) 259-0102 • FAX (707) 259-0117
www.aptech-online.com
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