AZ 11000 pages
SERIES AZ 1100
ABSOLUTE REGULATOR
Low flow — sub-atmospheric pressure
Operating Parameters
• Single stage
• SS 316L construction
• 10 µin. surface finish
(25 µin. optional)
Source pressure
Delivery pressure AZ 1101
Proof pressure
Burst pressure
vacuum to 300 psig (21 bar)
100 mm Hg absolute to 10 psig
500 psig (34 bar)
8,000 psig (552 bar)
seal (PCTFE) in the
process stream
• Cleaned, assembled and
packaged for high purity
semiconductor
applications
• Flow rate to 500 sccm
• Vacuum to 300 psig
(21 bar) inlet,
100 torr to 10 psig
(.7 bar) outlet
• Installation and operating
Other Parameters
Inlet/outlet connectors
Flow coefficient (Cv)
Internal volume
Operating temperature
Surface finish
Inboard leakage
Outboard leakage
Leakage across seat
Installation
1/4 or 3/8 inch face seal or tube weld
0.05
0.49 in3 (8 cm3)
-40° to +160°F (-40° to +71°C)
10 µin. (0.25 µm) Ra avg. standard
25 µin. (0.62 µm) Ra avg. optional
2 x 10-10 sccs
2 x 10-9 sccs He
4 x 10-8 sccs He
surface or panel (optional)
instructions available at
www.aptech-online.com
in the Tech Briefs section
Materials
Wetted Parts
Body, nozzle
Poppet, diaphragm
Finish
Seat
Series AZ 1100 S
Series AZ 1100 SHP
SS 316L*
SS 316L
electropolished and passivated
PCTFE
ENGINEERING DATA — SERIES AZ 1100 ABSOLUTE REGULATOR
• Only one nonmetallic
SS 316L*
Ni-Cr-Mo alloy / UNS N06022
electropolished and passivated
PCTFE
All specifications subject to change without notice.
*Please refer to product note PN 414 regarding single melt 316L SS material.
687 TECHNOLOGY WAY NAPA, CA 94558 • (707) 259-0102 • FAX (707) 259-0117
www.aptech-online.com
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