Single Axis Standard0 pages
Specifications
Model:
Travel
Performance Spec's (1): Precision Grade
Linear Displacement Accuracy
Straightness
Flatness (2)
Bi-Directional Linear Repeatability
Resolution
Feedback
Pitch (all +/-)
Yaw (all +/-)
Roll (all +/-)
AI-CM-2500
25 mm
AI-CM-6000
60 mm
AI-CM-10000
100 mm
AI-CM-15000
150 mm
(Std.) │ ULTRA │ NANO
± 3.0 μm │ ± 0.5 μm │ ± 0.2 μm
± 2.0 μm │ ± 0.5 μm │ ± 0.2 μm
± 2.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
12 arc-sec
12 arc-sec
12 arc-sec
(Std.) │ ULTRA │ NANO
± 3.0 μm │ ± 0.7 μm │ ± 0.2 μm
± 2.0 μm │ ± 0.7 μm │ ± 0.2 μm
± 2.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
12 arc-sec
12 arc-sec
12 arc-sec
(Std.) │ ULTRA │ NANO
± 3.0 μm │ ± 1.0 μm │ ± 0.2 μm
± 2.0 μm │ ± 1.0 μm │ ± 0.2 μm
± 2.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
12 arc-sec
12 arc-sec
12 arc-sec
(Std.) │ ULTRA │ NANO
± 3.0 μm │ ± 1.0 μm │ ± 0.3 μm
± 3.0 μm │ ± 1.0 μm │ ± 0.3 μm
± 3.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
15 arc-sec
15 arc-sec
15 arc-sec
0.2 m/sec
0.3 m/sec
0.5 m/sec
0.5 m/sec
0.5 G
8 kg
1.1 kg
0.7 kg
0.5 G
10 kg
1.4 kg
0.8 kg
0.5 G
12 kg
2.2 kg
1.3 kg
0.5 G
12 kg
2.5 kg
1.5 kg
Motion Profile Specifications
Max Velocity (3)
Max Acceleration (3)
Max Payload Capability
Assembly Mass
Moving Mass
Motion Profile Specifications
Motor Information
Drive Type
Motor Model
Magnetic Pitch (N-N)
Maximum line to line Voltage (4)
Electrical Time Constant
Maximum Motor Temp
Force Constant
Ironless, Brushless Servomotor
C12-1
30.48 mm
Motion Profile Specifications
Ironless, Brushless Servomotor
Ironless, Brushless Servomotor
C12-1
C12-1
30.48 mm
30.48 mm
Ironless, Brushless Servomotor
C12-1
30.48 mm
500 VDC
0.20 msec
130 °C
3.5 N/Apk
500 VDC
0.20 msec
130 °C
3.5 N/Apk
500 VDC
0.20 msec
130 °C
3.5 N/Apk
500 VDC
0.20 msec
130 °C
3.5 N/Apk
Phase Resistance (@ 25 °C) (5)
2.9 Ω
2.9 Ω
2.9 Ω
2.9 Ω
Phase Resistance (@ 130 °C) (5)
Inductance
4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08003-001
100,000 Hrs
4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08003-001
100,000 Hrs
4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08003-001
100,000 Hrs
4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08003-001
100,000 Hrs
Motor Connection: Delta
Continuous Force (6)
Motor Connection: Delta
Continuous Current (6)
Motor Connection: Delta
Peak Force (7)
Motor Connection: Delta
Peak Current (7)
Back EMF Constant
Corresponding ALIO Drawing #
Mean Time Between Failure
Notes:
(1) Specifications measured on stage centerline, 50mm above mounting surface. ALIO provides NIST traceable proof for all options/spec per quote.
(2) Flatness specifications dependent on system base. Contact ALIO for more information.
(3) Stage limitation at no load. Does not account for drive or resolution limitations.
(4) Back EMF plus IR drop must not exceed maximum line to line bus voltage.
(5) Resistance values do not include cable resistance. Cable resistance adds 0.146 ohm/m for Delta connection and 0.44 ohm/m for Wye Connection.
(6) Continuous operating limits are based on continuous operation at maximum temperature with aluminum heat sink (300mm x 12.5mm x motor length).
(7) Maximum on time at peak operating limits is 10 seconds.
(8) All electrical specifications may vary by 12% from listed values.
(9) Additional motor and travel options are available for each stage for optimized performance as necessary per customer requirements.
(10) Lack of mounting surface quality and environmental control may force stages out of these specifications.
Sitz: Weßling • Amtsgericht München HRB 200860 • Ust-IdNr.: DE285161566
Geschäftsführer: C. William Hennessey