Z Air Bearing Stages AI-VC-2400-Z-AB0 pages
A
4
8X n7.14 mm THRU
v n11.13 mm x 67.70 mm
A
4X n5.0 mm (H9) x 5.0 mm
SLIP FIT FOR M5 DOWEL PIN
50.00 mm [1.969 in]
3.000 [76.2 mm]
B
50.00 mm [1.969 in]
2.500 [63.5 mm]
8X M6x1 - 6H x 10.00 mm
EQ SP ON BCD
4
3
ALIO INDUSTRIES PROPRIETARY INFORMATION
3
2
CUSTOM DESIGNS FOR OEM INTEGRATION
COUNTERBALANCE SPECIFICATIONS
ADJUSTABLE PNEUMATIC COUNTERBALANCE
USE PRESSURE REGULATOR AND QUICK EXHAUST VALVE
AIR BEARING PERFORMANCE SPECIFICATIONS
OPERATING PRESSURE: 60 PSIG TO 80 PSIG
FLOWRATE: 14-18 NLPM (29-38 SCFH)
MAX RADIAL LOAD: 280 N (63 lbs)
RADIAL STIFFNESS: 51 N/um (0.29 lbs/uin)
PITCH STIFFNESS: 8.0 N-m/mrad (71 lbs-in/mrad)
PITCH & ROLL MOMENT (MAX): 1.9 N-m (17 lbs-in)
ALL SPECIFICATIONS LISTED FOR 60 psig OPERATING PRESSURE
LOADING, STIFFNESS, AND MOMENT SPECIFICATIONS INCREASE
AT HIGHER OPERATING PRESSURES
STANDARD FEATURES
MOTOR: LINEAR VOICE COIL
FORCE CONSTANT: 17 N/AMP
PEAK FORCE: 80 N
CONTINUOUS FORCE: 20 N
Z TRAVEL: 24mm
PAYLOAD: 0 - 20 kg
(CONSULT FACTOR FOR HIGHER PAYLOAD)
SPEED: > 0.5 m/sec (LOAD DEPENDENT)
ENCODER RESOLUTION: ANALOG 1 VOLT, PEAK TO PEAK
OPTIONAL: 5um, 1um, 0.5um, 0.1um, 0.05um, 0.02um,
0.01um or 5nm USING 4096 INTERPOLATION
HOME SENSOR: STANDARD
BEARINGS: PRECISION AIR BEARINGS
AIR QUALITY MUST CONFORM TO SPECIFICATION
ENCLOSURES: ALUMINUM
ENVIRONMENT: STANDARD, CLEAN ROOM
TEMPERATURE: 0 to 35 DEG C
HUMIDITY: 10% to 80% NON-CONDENSING
ASSEMBLY MASS: 6.5 kg
MOVING MASS: 2.8 kg
1
x.xx ` 0.12 [x.xxx `.005 in]
MATERIAL
x.x ` 0.5 mm [x.xx `.02 in]
x ` 1 mm [x.x `.04 in]
Tolerances:
CHECKED
NBrown
DRAWN
2
2/3/2005
SHEET
1
OF
REV
1
1
0010-01510
B
SCALE
001
DWG NO
SIZE
AI-VC-2400-Z-AB
TITLE
USE IN-LINE PRESSURE SWITCH TO KILL MOTOR POWER IF
AIR PRESSURE DROPS BELOW RATED OPERATING VALUE. 11919 W I-70 FRONTAGE ROAD NORTH, UNIT 119, WHEAT RIDGE, CO 80033 USA
NO NOT OPERATE UNLESS AIR PRESSURE IS APPLIED!
(Tel) 303.339.7500 - SALES@ALIOINDUSTRIES.COM - WWW.ALIOINDUSTRIES.COM
CLASS: 4 (MINIMUM)
DIRT: 15 MICRON PARTICAL SIZE OR SMALLER
WATER: +37.4 F, PRESSURE DEWPOINT
(940 ppm. vol.) AT 100 psig
OIL: 5 mg/m**3 (INCLUDING VAPOR)
CLASS: 3 (RECOMMENDED)
DIRT: 5 MICRON PARTICAL SIZE OR SMALLER
WATER: -4 F, PRESSURE DEWPOINT
(128 ppm. vol.) AT 100 psig
OIL: 1.0 mg/m**3 (INCLUDING VAPOR)
AIR SUPPLY MUST BE FREE OF CONTAMINANTS
AND MOISTURE. FILTERED AIR SUPPLY TO
ISO 8573.1 QUALITY CLASS 3
AIR QUALITY
(TOP VIEW SHOWING
STAGE BASE MOUNTING)
VIEW A-A
75.00 mm [2.953 in]
38.10 mm [1.500 in]
0.00 mm [0.000 in]
38.10 mm [1.500 in]
75.00 mm [2.953 in]
3.937 [100 mm]
AT BOTTOM OF STROKE
A
n200.00 mm [7.874 in]
n40.00 mm [1.575 in] THRU
n125.00 mm [4.921 in]
3.000 [76.2 mm]
2.500 [63.5 mm]
1.969 [50 mm]
1.476 [37.5 mm]
.000 [0 mm]
1.476 [37.5 mm]
1.969 [50 mm]
A
B
"