NewView 7000 series0 pages
Z Y G O C O R P O R AT I O N ’ S
NewView™ 7000 Series
of 3D Optical Profilers
Precise, Noncontact Surface Metrology
for MEMS
To meet the challenges and varying needs of MEMS research
and production, Zygo Corporation has developed the
NewView™ 7000 series of 3D optical profilers for precise
surface measurement and characterization of micro-devices.
Employing leading-edge and patented scanning technology,
the NewView™ enables noncontact surface profiling of smooth
and rough surfaces, large steps, and thick films, for flexible and
complete MEMS metrology on a single platform – with
sub-nanometer resolution.
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Fast, noncontact surface topography measurement
Full 3D static and dynamic metrology capabilities
Sub-nanometer Z-resolution
Leading precision and gage capability
Enhanced optical imaging
Variable field-of-view and magnification
Large vertical scan range
Long-working distance imaging objectives
Comprehensive data segmentation and analyses
Flexible and configurable platform
Compatible with diffuse or specular surfaces
ZYGO CORPORATION
LAUREL BROOK ROAD • MIDDLEFIELD, CT 06455 USA
VOICE: 860 347-8506 • FAX: 860 346-4188
WWW.ZYGO.COM • EMAIL: inquire@zygo.com