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IL 26000 pages
نسخه متنی
"
semiconductor
Development and production
of laser and sorting systems
IL 2600 Sorting System
The InnoLas IL 2600 wafer sorting system can automatically sort, split, merge and transfer wafers from
any slot / cassette to any other slot / cassette in a
six cassette array.
Wafer sizes from 2“ to 100mm and 100mm to
200mm can be handled in a single or multi-batch
operation without the need of any mechanical adjustments.
The laser mark code read for verification can be located at any position on the front and/or backside
of the wafer.
The basic model has one reading unit (OCR, BC412,
T7) for reading the laser code on the frontside of
the wafer. A second reading unit (OCR, BC412, T7)
for reading the code on the backside of the wafer
can be mounted as an option.
