ils_500x0 pages

ILS 500X
Laser Processing System for Crystalline and Thin Film Applications
Extremely Flexible Laser System with
High Precision X/Y-Table
The ILS 500X is equipped with a high precision
X/Y-table. This offers enhanced flexibility for processing both crystalline cells as well as thin film applications. The X/Y table utilizes precise linear motors
and high-resolution glass scales for each axis, the
accuracy and precision is well below 5 μm.
Ideal for Use in State of the Art R&D Crystalline
and Thin Film Solar Cell Processing:
Crystalline application:
t Selective Emitter
t Contact Opening
t Front / Back Side
(IBC, iPERC)
Thin film application:
t CIS/CIGS P1, P2, P3
t CdTe P1, P2, P3
t Amorphous silicon
(a-Si:H), or
micromorph silicon
P1, P2, P3
t EWT/MWT
t Laser
Fired Contacts
t Junction
t Via
Isolation
Features
speed laser galvanometer or short
t focal length optic with process gas nozzle
tavailable
t t High
t t Process
gas
t t Process
cabin exhaust
t t Multiple
vision system options for custom
tapplications
t t Vision
recognition system provides laser
t positioning accuracy to within a few
tmicrons
t t Vision
system detection of entire cell
t perimeter available for edge isolation
t applications for wafers containing chips
t and cracks along the cell edge
t t Automatic
cell handling available as
t an option
Edge Deletion
Drilling
t Cutting
www.innolas-systems.com
InnoLas Systems GmbH
Robert-Stirling-Ring 2
82152 Krailling
Germany
Phone: +49 89 / 899 4828-0
Fax: +49 89/ 899 4828-1111
info@innolas-systems.com
InnoLas, Inc.
220 Chatham Business Drive
Pittsboro, NC 27312
USA
Phone: +1 919-533-4697
Fax: +1 866-653-1640
info@innolasinc.com
InnoLas SEA Pte Ltd
371 Beach Road
15-02 Keypoint
Singapore 199597
Phone: +65 63910293
Fax: +65 63910295
colin.yeoh@innolas.com