ils_tt0 pages

ILS TT
Laser Processing System for Crystalline Applications
High Speed Crystalline Solar Cell Processing
The ILS TT is a state of the art laser production
system with an integrated dynamic turntable for
maximum productivity of up to 3600 cells per
hour. It is designed for production scale manufacturing as well as pilot line in research and development. The ILS TT offers the ability to integrate two
laser sources in the same system for processing two
individual cells simultaneously or for subsequent
processing with different laser sources/wave
lengths. This maximizes flexibility and throughput.
Typical Functions of the InnoLas ILS TT include:
t t Selective Emitter Doping
tt Contact Opening
t tFront / Back Side (IBC, iPERC)
t t Metal Wrap Through
t Laser Fired Contacts
Junction Isolation
t t Wafer Cutting / Drilling
www.innolas-systems.com
InnoLas Systems GmbH
Robert-Stirling-Ring 2
82152 Krailling
Germany
Phone: +49 89 / 899 4828-0
Fax: +49 89/ 899 4828-1111
info@innolas-systems.com
Features
t t Stand alone and production line
t integrated systems
t t Parallel
processing of up to 2 substrates
t simultaneously
t t Selection
of appropriate laser sources
t according to the application‘s requirements
t t Innovative
beam guiding and vision systems
t t Semiautomatic
t t Cell
calibration function
locating to less than 5 µm
t t Vision
system detection of entire cell
t perimeter for edge isolation applications
t for wafers containing chips and cracks
t along the cell edge
t t 3-,
5- or even 8-Point alignment methods
t available (wafer edges or fiducials)
t t Dual
flying optics or dual Scanner available
t Full
scale automation in various
t configurations available
InnoLas, Inc.
220 Chatham Business Drive
Pittsboro, NC 27312
USA
Phone: +1 919-533-4697
Fax: +1 866-653-1640
info@innolasinc.com
InnoLas SEA Pte Ltd
371 Beach Road
15-02 Keypoint
Singapore 199597
Phone: +65 63910293
Fax: +65 63910295
colin.yeoh@innolas.com