V80-G0 pages

Plasma technology

Low-pressure plasma system V80-G
Standard system for cleaning, activation and etching
The system V80-G is suitable for industrial
production as well as for R&D applications
in the laboratory sector.
The integrated professional SPS control
serves as a storage for definable processes
and parameters.

View into the process chamber:
cleaning of leadframes in a
magazine.

System features
•• USB port
•• Ethernet interface
•• Remote maintenance (VPN)
•• Microwave coupling from the top
•• Swing door

Technical data
Dimensions of the system (W x D x H): 630 x 900 x 1,850 mm
Dimensions of the chamber (W x D x H): 400 x 460 x 430 mm
Plasma excitation frequency: Microwave (2.45 GHz)
Microwave power: 100-1,200 W
Gas inlets with mass-flow-control: 2 channels
Power supply: 230 / 400 V, 50 / 60 Hz
Power input: 2,2 kVA
Vacuum gauge: Pirani
Weight: 350 kg

PINK GmbH
Thermosysteme
Am Kessler 6
97877 Wertheim
Germany
T +49 (0) 93 42 919-0
F +49 (0) 93 42 919-111
plasma-finish@pink.de
www.pink.de

Options
•• Vacuum pump
•• Ozone trap
•• Up to two additional gas inlets
•• Aditional excitation frequencies
t (40 kHz, 13.56 MHz)
•• Rotary drum for the treatment
t of bulk material
•• Rotary table
•• Pullout door
•• Automatic door opening
•• Rack with shelves
•• Lateral microwave coupling
•• Soft start and slow vent