Brooks® Metal-Sealed Pressure Controllers SLA7810/200 pages
1
Data Sheet
DS-PR-SLA7800-PC-eng
November, 2008
Model SLA7810 & SLA7820
General Features:
• 1-1/8" (28.58 mm) Mechanical Platform
• High Performance Co-Planar valve
• All wetted surfaces are 32 Ra maximum
to maintain particle, moisture and contamination free
process conditions.
• All-Metal seals, High leak integrity
(less than 1x10-10 atm-cc/sec He)
• Accuracy: ±0.5% F.S., including linearity and
hysteresis to assure device is controlling
precisely at the desired level.
• Digital Communication options offer easy
commissioning and reduced system wiring.
• Device can store 10 selectable pressure applications
• CE Compliant
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced
System-Wiring
• Accessibility of sensor, valve, calibration,
tuning and diagnostic data
• MAC-ID, Baudrate rotary switches, and
two bi-color status LEDs
• Vendor Specific Device-Profile,
ODVATM certified
• Capable of: Polled, Bit-Strobe, Cyclic, &
Change-of-State messaging, plus UCMM
Analog I/O:
• 15-pin
• 0-5 Volt command-setpoint
and pressure signals
• Single sided 15 Volt DC power supply
• Separate ‘valve-override’ signal
• Compatible with Brooks' Model 0150 Series
secondary electronics
Model SLA7810D/SLA7820D
Digital I/O DeviceNet
Pressure Controller Upstream
Model SLA7810A/SLA7820A
Analog I/O
Pressure Controller Upstream
Brooks® Metal-Sealed Pressure Controllers
Analog I/O Pin Connections:
Signal: 15-pin D-conn
Setpoint/Command Common 1
Pressure Signal Out 2
15V Power Supply 5
15V(unused) 6
Setpoint/Command Input 8
Power Supply Common 9
Output Signal Common 10
+5V Reference 11
Valve Override 12
Application Select Pin 13
Not Connected 3, 4, 7,14,15