5866RT: Pressure Regulator - Mechanical0 pages

Data Sheet
DS-PR-5866-RT-eng
March, 2010

Brooks® Model 5866RT

Elastomer or Metal Seal Remote Transducer
Pressure Controller / Flowmeter
GENERAL FEATURES
• High accuracy
• High leak integrity
• Electropolished wetted surfaces (optional)
• Pressure control and flow measurement
• Compact design
• Wide flow measurement range
• Dynamic tuning adjustments with top mounted DIP
switches
• Electrically activated valve override
DESCRIPTION
The Brooks® Model 5866RT Pressure Controller/
Flowmeter controls pressure while also measuring flow
rate. The Model 5866RT receives a remote pressure
transducer signal, and using adjustable integral PID
control electronics and control valve, will maintain a
desired set pressure. In addition to the pressure control
function, the Model 5866RT provides a 0-5 V signal
which is linear with mass flow rate. The Model 5866RT
can also be configured as a mass flow controller for
calibration or test purposes.
SPECIFICATIONS
Flow Ranges*
Any range from 0 to 3 sccm to 0 to 30,000 sccm N2Eq.
*Standard pressure and temperature in accordance
with SEMI (Semiconductor Equipment and Materials
Institute) standard: 0°C and 101 kPa (760 torr).
Flow Output Signals
0-5 Vdc, max. load 1 k ohm
Flow Accuracy
±1.0% full scale including linearity at the calibration
conditions. ±1.5% full scale for flow rates greater than
20 slpm.
Flow Repeatability
±0.25% of rate
Flow Temperature Coefficient
0.1% full scale/°C
Pressure Ranges
Dependent upon remote pressure transducer

Model 5866RT Pressure Controller / Flowmeter

Remote Pressure Sensor Input
Suitable for any pressure sensor with a 0-5 V or 0-10 V
output signal.
Pressure Setpoint Signal
0-5 Vdc or 0-10 V. 5 Vdc reference output available for
setpoint generation. 1 k ohm maximum load.
Pressure Ratings
Maximum pressure: 1500 psig
(PED) Pressure Equipment Directive 97/23/EC
Sound Engineering Practice (SEP)
Pressure Control Range
100:1 for a remote transducer with a 0-10 V output
Pressure Response Time
Less than 0.8 seconds typical for a 0-100% command
step with less than 2% pressure overshoot. Actual
pressure response depends on system design.
Temperature Range
32 to 150°F (0-65°C)
Input/Output Offset
0.2% full scale
Leak Integrity, Inboard to Outboard
1 x 10-9 atm cc/sec Helium max. (Elastomer Seal)
1 x 10-10 atm scc/sec Helium max. (Metal Seal)

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