Brooks® Smart (DMFC) MFC/MFM0 pages

Data Sheet
DS-TMF-5800S-MFC-eng
April, 2008
Models 5800-S Series
1
Brooks® Smart (DMFC) MFC/MFM
Brooks Smart (DMFC) Mass Flow Meters and Mass Flow Controllers
Benefits:
• Compact design, provides mass flow
measurement and control of gases from
3 mln/min. full scale up to 2500 ln/min.
• High accuracy, repeatability and immunity to
temperature changes improve the
performance of your process.
• Provided with adaptive control algorithm
to ensure fast response, robust and stable
control of gas flow applications even under
varying process conditions.
• Long term reliability, negligible zero drift
ensures reliable measurement and control.
• Fully Customer programmable PID control,
I/O’s and alarms.
• Smart technology, available for elastomer-,
metal sealed-, or ultra high purity (UHP) Mass
Flow Meters/Controllers.
• Industrial Downport (ISA 76.00.02)
• Smart technology, available with PROFIBUSDP
communication and Analogue I/O’s.
• Smart technology, available with selectable
Analogue I/O’s and digital communication
(HART based) via RS 232 or RS 485. With
digital communications you can operate
easily with most Windows based applications
which support DDE.
• Easy and cost effective installation (fit-and
forget) and high operating integrity through
self-monitoring.
• Thousands of Brooks Smart Mass Flow Meters
and Controllers have been installed and
operate successfully in a variety of industries
under various process conditions.
• Designed, developed, manufactured and
supplied by the first ISO-9001 Quality Certified
M&C company in the world: Brooks Instrument.
• ATEX zone II according to KEMA 03ATEX1433 X