Brooks® Models 5866E & 5866M Elastomer and Metal Seal Pressure Controllers0 pages
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Brooks® Models 5866E & 5866M
Data Sheet
DS-PR-5866E-5866M-PC-eng
November, 2008
Brooks® Models 5866E & 5866M
Elastomer and Metal Seal Pressure Controllers
Model 5866E
Elastomer Seal
Pressure Controller
Model 5866M
Metal Seal
Pressure Controller
GENERAL FEATURES
• Integral pressure transducer
• Electropolished wetted surfaces (optional)
• High accuracy
• High leak integrity
• Suitable for upstream or downstream control
• Normally closed valve (normally open valve
optional)
• Current or voltage signal
• External valve control capability
• Electrically activated valve override
• Wide range of full scale pressures
• Eliminates droop, hysteresis and boost