SLA6910: Digital, UHP, Metal Seal, PC0 pages
Data Sheet
DS-PR-SLA6900-PC-eng
March, 2008
Brooks® Delta Class UHP
Metal-Sealed Pressure Controllers
UHP Series Models SLA6910 & SLA6920
General Features:
• Digital software can store 10 selectable
calibration and pressure ranges. Spares
inventories are reduced by limiting the
number of individual PCs required, lowering
inventory holding costs.
• Accuracy: ±0.5% F.S., including linearity
and hysteresis for precision control.
• Available with VCRTM , CS or C-seal Downport
connections - simplifying integration into
existing and/or developing tools and systems
in the semiconductor industry.
• All wetted surfaces are electro-polished
to 5 Ra internal finish to maintain particle,
moisture and contamination free processes
conditions.
• All-Metal seals, High leak integrity
(less than 10-10 atm-cc/sec He)
• Eliminates droop, hysteresis, and boost
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced
System-Wiring
• Accessibility of sensor, valve, calibration,
tuning and diagnostic data
• MAC-ID and Baudrate rotary switches, and
two bi-color status LEDs
• Standard Device-Profile, ODVA
Semiconductor-SIG certified
• Capable of: Polled, Bit-Strobe, Cyclic, &
Change-of-State messaging
Analog I/O:
• 15-pin
• 0-5 Volt command-setpoint and pressure signals
• Single sided +15 Volt DC power supply
• Separate ‘valve-override’ signal
• Compatible with Brooks Models 0150 Series
secondary electronics
Models SLA6910A
and SLA6920A Analog I/O
Pressure Controller
Models SLA6910D and
SLA6920D Digital I/O DeviceNet
Pressure Controller
Analog I/O Pin Connections:
Signal:
15-pin D-conn
Setpoint/Command Common
1
Pressure Signal Out
2
+15Vdc power
5
-15V(unused)
6
Setpoint/Command Input
8
Power Supply Common
9
10
+5V reference
11
Valve Override
12
Calibration Select Pin
*
Output Signal Common
13
Based on data collected determining MTBF for
Chassis Ground
14
Model 5964 valve and body.
No Connections
3, 4, 7, 15
"