5866E: Analog, Elastomer Seal, PC0 pages
Data Sheet
DS-PR-5866E-5866M-PC-eng
November, 2008
Brooks® Models 5866E & 5866M
Brooks® Models 5866E & 5866M
Elastomer and Metal Seal Pressure Controllers
Model 5866E
Elastomer Seal
Pressure Controller
Model 5866M
Metal Seal
Pressure Controller
GENERAL FEATURES
• Integral pressure transducer
• Current or voltage signal
• Electropolished wetted surfaces (optional)
• External valve control capability
• High accuracy
• Electrically activated valve override
• High leak integrity
• Wide range of full scale pressures
• Suitable for upstream or downstream control
• Eliminates droop, hysteresis and boost
• Normally closed valve (normally open valve
optional)
1
"