BSMmax0 pages

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gl Donaldson.

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ÏSM FILTRATION SOLUTIONS

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BSMmax

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AIRBORNE MOLECULAR

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CONTAMINATION FILTERS

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Semiconductor Filtration

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BSMmax - THE NEXT GENERATION OF

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BROAD SPECTRUM MEDIA FILTRATION

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Since Donaldson first introduced broad spectrum filter

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media for the semiconductor industry, considerable

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studies have gone into the actual levels of contaminant

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types in ambient air. Simultaneously, tool manufacturers

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have shown increasing concern about the presence

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of Si-containing compounds in cleanroom air and

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the resulting irreversible damage to optical elements.

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To meet these increasingly complex and stringent

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demands, Donaldson developed the BSMmax filter that

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offers the maximum protection, filter life, and flexibility

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for the broadest spectrum of contaminants that can

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degrade tools and processes.

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FEATURES & BENEFITS

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• Removal capacity for:

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• Acids (S02, HCI, HBr)

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• Bases (NH3, NMP, amines)

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• Condensable organics (HMDSO, TMS)

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• More capacity than current carbon filters

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of comparable size

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• These filters are eligible for the

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Donaldson Refill Program

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• Global sales and service

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BSMmax chemical filters are available for

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LITHOGUARD®v1.0, v2.0, v3.0, and LITHOGUARD-12

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chemical filtration cabinets.

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