Mass Flow Controller_SEC-E series0 pages

External dimensions

SEC-E40/E50/E60/E70/E40MK3/E50MK3

SEF-E40/E50/E60/E70

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III

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► List of external dimensions

SEC-E40/E50/E60/E70/E40MK3/E50MK3 SEF-E40/E50/E60/E70

X4-M6deplhl0

Joint: 1/2 Swagelok type

,4-M6 depthlO

Joint: 1/2 Swagelok type

I Accessories

MultifUnCtiOnal COntrOl Unit : PE-S7 (ComplleswtttiallRoHSregulaHons) POWer SUPply UnitS : PE-IO and PE-30S (ComplleswIthallRoHSregulatlons)

In addition to functions necessary to control mass flow controllers, this control

unit has various functions such as a program control function and an alarm function.

• Multi-range solution

• Flow rate setting function/preset

• Integration function

• Program control function

• Instant integrated flow alarm output

• Software slow start function

• Flow rate valve switch function: fully open/ fully closed/ control

• Flow rate / Setting rate display function: SET/OUT

coinstantaneous display

• Complies with the DIN standard

These power supply units provide a power supply for a mass flow controller (mass flow meter) and

a display unit as well as reference voltage (5 VDC) for setting flow rates. These can be connected

with signal cables and connectors.

PE-10 series

Can be used with all analog mass flow controllers (massflow meters]

PE-11: For 1 unit, PE-14: For 4 units, PE-16: For 6 units

PE-30S series

Can be used with all mass flow controllers (mass flow meters)

Power supply units of this series have a current control function (4 to 20

mA) as an additional function and can be used with a wide range of

external control devices.

These also have functions for setting upper and lower flow rate limits

and outputting alarms. PE-31S: For 1 unit, PE-34S: For 4 units

* We will advise on appropriate power supply units for your applications.

Control units: PE-D10/D20

(Complies with all FtoHS regulations)

In addition to functions necessary to control mass

flow controllers, these control units have various

functions such as an alarm function.

PE-D10: Can be used with mass flow meters of the SEF series

PE-D20: Can be used with mass flow controllers of the SEC series

• Flow rate setting function

* Flow rate alarm function

• Flow rate control valve switch function: fully open,

fully close, and control

• Flow rate / Setting rate display function: SET/OUT

coinstantaneous display

Display units: DU-103K/102E Setting units: SU-503ED/502EA

[Complies with all RoHS regulations)

These display units display flow rate

output signals from a mass flow controller

(mass flow meter). By setting a full-scale

flow rate, the actual flow rate can be

displayed directly.

DU-103K: Compact type

DU-102E: Standard type

(Complies with all RoHS regulations)

These setting units can be used to set a flow

rate for a mass flow controller.

SU-502EA: Analog display type

SU-503ED: Digital display type

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Signal cables for the SC-E series

(Complies with all RoHS regulations)

These signal cables are required to connect

various control units to a mass flow controller

(mass flow meter).

SC-EDH type: Connection cable for control units

(PE-S7/PE-D10, D20)

SC-EEH type: Connection cable for a power supply unit,

a display unit, and a setting unit

* Cable length: Available in 1/ 2/ 3/ 5/10 m.

RoHS regulations : RoHS standards for "Restriction of Hazardous Substances'and is a set of regulations enforced in the EU to limit the use of six hazardous substances

(lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs) and polybrominated diphenyls (PBDEs)), in electric and electronic components.

HORIBASTEC

HORIBA STEC, Co., Ltd.

http://www.horiba-stec.jp/e.

• The contents of this catalog are subject to change without prior notice, and without any

subsequent liability to this company. • It is strictly forbidden to copy the content of this

catalog in part or in full. • All brand names, product names and service names, in this

catalog are trademarks or registered trademarks of their respective companies.

HEAD OFFICE

11-5, Hokodate-cho, Kamrtoba, Minami-ku, Kyoto, 601-8116 Japan

TEL: (81)75-693-2300 FAX: (81)75-693-2350

ft\ Please read the operation manual before using this product to ensure safe and proper handling of the product.

TAIWAN

HORIBA STEC Co., Ltd TAIWAN Branch

3F., No.18, Lane 676, Jhonghua Rd., Jhubel City,

Hsinchu County 302, Taiwan (R.O.C.)

PHONE: $86)3-656-1160 FAX: (886)3-656-8231

Tainan Office

1F., No.117, Chenggong Rd., Shanhua Township,

Tainan County 741, Taiwan (R.O.C.)

PHONE: (886)6-583-4592 FAX: (886)6-583-2409

KOREA

HORIBA STEC KOREA, Ltd.

110, Suntech-City, 513-15, Sangdaawon-Dong, Jungwon-Ku,

Sungnam-City. Kyungki-Do, 462-725 Korea

PHONE: (82)31-777-2277 FAX: (82)31-777-2288

HORIBA INSTRUMENTS (SINGAPORE) Pta. Ltd.

10 Ubi Crescent. Lobby B #05-11/12 Ubi techpark Singapore 408564

PHONE: (65)6-745-8300 FAX: (65)6-745-8155

SE-AE33C

U.S.A.

HORIBA/STEC Inc.

Santa Clara Head Office (Technology Center)

3265 Scott Boulevard Santa Clara, CA 95054

PHONE: (1)408-730-4772 FAX: (1)408-730-8975

Austin Office

9701 Dessau Rd., Suite 605, Austin, TX 78754

PHONE: (1)512-836-9560 FAX: (1)512-836-8054

U.K.

HORIBA INSTRUMENTS Ltd.

Kyoto Close, Summerhouse Rd., Moutton Park,

Northampton NN3 6FL England

PHONE: (44)1604-542-600 FAX: (44)1604-542-696

Recycled paper

Printed in Japan

Oct. 2010

HORIBA

STEC Fluid Control

k Technology

Low cost Mass Flow Controllers

-E

SEC-E40/E50/E60/E70/E80/E40MK3/E50MK3

Low cost mass flow controller SEC-E series

controls flow rates from 10 seem to 500 slm.

# Controls burner gas for industrial furnaces

and heat treatment furnaces

# Controls gas in photovoltaic device

manufacturing applications

# Controls atmospheric gases in a wide

variety of chambers

High-speed response

Responds to a set flow rate within 1 second

High accuracy

±1.0%F.S.

SEC-E40

High reliability

Robust design also employs an automatic

zero adjust function

(SEC-E40/E50/E40MK3/E50MK3)