MI/MV0 pages

MI/MV Vaporizer Specifications
Model

MI-1000

Model

All liquids except those corrosive to stainless steel
(ex. HCl, HF)
Liquid Material

Liquid Material

Example generated flow rate: TEOS(to 7g/min),
IPA(to 3cc/min)
Heater

Heater
Wetted parts

120V(100W) / 208V(100W ) /240V(100W) available
SUS316L,PFA

Wetted parts

MV-1000
All liquids except those corrosive to stainless steel
(ex. HCl, HF)
Max. 5.0 CCM conversion (liquid phase
conversion)
Control Valve: 120V(100W) / 208V(100W) /
240V(100W) available
Vaporizer: 120V(100W) / 208V(100W) /
240V(100W) available
SUS316L,PFA

Setting Temperature

Max 140°C

Setting Temperature

Control Valve: Max 140°C Vaporizer: Max 200°C

Temperature Sensor

Thermocouple K type

Temperature Sensor

Thermocouple K type (Control valve, Vaporizer)

Temperature Switch

High limit 2450RC 160°C (ELMWOOD) NC type
Temperature Switch

Control Valve: High limit 2450RC
160°C(ELMWOOD) NC type
Vaporizer: High limit 2450RC 250°C(ELMWOOD)
NC type

External leak

-8

3

Less than 1 to 10 Pa·m /s (He)
Control Valve: Less than 1 to 10-6 Pa·m3/s (He)

External leak

Less than 1 to 10-8 Pa·m3/s (He)

Leak Integrity
Air Valve Option: Less than 1 to 10-9 Pa·m3/s (He)

Control Valve: Less than 1 to 10-6 Pa·m3/s (He)
Leak Integrity

Liquid Inlet 1/8inch VCR type Male
Standard Fitting

Vaporizer: Less than 1 to 10-9 Pa·m3/s (He)

Gas Inlet 1/4inch VCR type Female

Liquid Inlet 1/8inch VCR type Male

Gas Outlet 1/4inch VCR type Male
Operating Temperature
Pressure Resistance
Option
Weight (exclude cable)

Standard Fitting

15°C to 50°C
1.0MPa (G)
Pneumatic valve
620 ± 10g (Standard Type),
700 ± 10g (Air Valve Option Type)

Gas Inlet 1/4inch VCR type Female
Gas Outlet 1/2inch VCR type Male

Operating Temperature
Pressure Resistance
Option
Weight (exclude cable)

15°C to 50°C
1.0MPa (G)
Pneumatic valve
1110 ± 10g (Standard Type),
1190 ± 10g (Air Valve Option Type)

MI/MV Series Web Ver.001
Subject to chang