CMP Profile® II Filter Capsules0 pages
CMP Filtration Capsules
nnnnData Sheet A33a
nnnnPALL) Microelectronics
nnnnCMP Profile® II Filter Capsules
nnnnDescription
nnnnCMP Profile II Filter Capsules are
nnnndesigned for the filtration of both oxide
nnnnand metal slurries at chemical mechani-
nnnncal polishing (CMP) tools.
nnnn• Compact completely disposable
nnnncapsule consists of an all polypro-
nnnnpylene Profile II filter element in a
nnnnheat-welded polypropylene shell.
nnnn• Profile II filter elements are techno-
nnnnlogically advanced depth filters with
nnnnabsolute removal ratings. The unique
nnnnconstruction with built-in preflltratlon
nnnnassures long service life and
nnnnconsistent high level performance with
nnnnneither breakthrough of contaminants
nnnnnor shedding of filter medium.
nnnn• The availability of absolute filter
nnnnremoval ratings, from 1 urn to 70 urn
nnnnassures selection of the capsules to
nnnnmatch the range of CMP slurries.
nnnn• CMP capsules retain aggregated
nnnnmaterial and foreign matter and have
nnnnnot been shown to alter slurry
nnnnpolishing characteristics.
nnnnSpecifications
nnnnMaterials
nnnn• Medium: Continuous polypropylene
nnnnfilament
nnnn• Core: Polypropylene
nnnn• Shell: Polypropylene
nnnnRemoval Ratings
nnnn• 1 urn, 3 urn, 5 urn, 10 urn, 20 urn,
nnnn40 urn, and 70 urn
nnnn(Profile filter removal ratings can be
nnnn5-10 times finer than traditional
nnnnratings for depth filters.)
nnnnOperating Conditions1
nnnn• Maximum Pressure:
nnnn100 psid/7 bar @ 100°F / 40°C
nnnn• Maximum Differential Pressure:
nnnn60 psid/4 bar @ 77°F / 25°C
nnnn30 psid/2bar@ 140°F/60°C
nnnn• Maximum Temperature:
nnnn140°F/60°C @ 60 psi/4bar
nnnnConnections
nnnn• Inlet/Outlet: %" NPT
nnnn1 Recommendations are based on long term tests
nnnnin water. Compatibility with other fluids must be
nnnnchecked before use.
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