Gaskleen® TM Filter Assemblies 11⁄2 ˝ W-Seal0 pages

Data Sheet A90a

Gas Filtration Assemblies — Metal

Gaskleen® TM Filter Assemblies
11⁄2 ˝ W-Seal

Description

Specifications

Pall's Gaskleen Top Mount (TM) filter
assemblies are designed for ≥ 3 nanometer
filtration of semiconductor process gases.
The top mount filter is well-suited for
integrated gas delivery systems, providing
easy access and change.

Materials

Connections

• Electropolished 316L stainless steel
housing
• Cr:Fe (1:1) chromium-enriched
internal surface chemistry
≤ 0.7 µm Rmax internal surface finish

• W-seal, 11⁄2 ˝ interface

• Electropolished 316L stainless steel
housing
• State-of-the-art 316L stainless steel
filter medium
• High temperature and pressure
capabilities
• Excellent gas displacement and
desorption characteristics
• 100% helium leak tested
• Manufactured and packaged in a
cleanroom environment
• Available with a 1⁄4 ˝ VCR1 port on top
of assembly for a pressure gauge or
other component
• Improved corrosion resistance using
Pall’s proprietary process

Removal Rating
• ≥ 3 nm

Particle Removal Characteristics
• 109 reduction at rated flow of 5 slpm
• 106 reduction at rated flow of 15 slpm
• 104 reduction at rated flow of 30 slpm

Leak Rating
• 100% helium leak tested to
10-9 atm • cm3/s
• Design validated to 10-11 atm • cm3/s

Operating Conditions
• Maximum operating pressure:
0.97 MPa @ 40°C / 140 psig @ 104°F
• Maximum allowable differential
pressure:
0.69 MPa @ 40°C / 100 p