DFA?-EZ Filter Assembly (CMP)0 pages

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CMP Filtration Filters A101

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PALL) Microelectronics

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DFA™-EZ Filter Assembly1

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Description

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The DFA™-EZ compact filter capsule

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assembly Is designed for small volume

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processing. The configuration allows for

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quick, safe and simple filter change-outs

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and easy maintenance. It is Ideally suited

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for point-of-use filtration of photoresists,

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various slurries and other compatible liquids.

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• In-line flow path with minimal dead space

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• One-step quick disconnect filter

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replacement

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• The Profile® depth filter media is Ideally

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suited for the removal of gels,

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aggregates and oversize particles

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• Capsule design prevents Incorrect

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orientation and installation

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• Nozzle connections can be readily

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removed for cleaning

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• Compact size

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• Ease of use minimizes down-time

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• Minimizes operator exposure to solvents

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• Small footprint permits Installation In

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narrow confines

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Specifications

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Materials

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Filter Capsule

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• Medium: Polypropylene

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• Core, cage, end caps, support,

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drainage and housing: Polypropylene

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• End seal/Side seal: Heat sealed

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• O-rlng options: EPDM, Perfluoro-

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elastomer

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Head Manifold

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• Frame: SUS 304 (FEP coated)

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• Connection Nozzles: Polyethylene

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Removal Ratings

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• 1.5 urn, 3 urn, 5 urn

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Operating Conditions

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• Maximum Operating Temperature: 38°C

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• Maximum Operating Pressure: 0.19 MPa

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@ 38°C

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Connections

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• Inlet/Outlet:

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6 mm Swagelok2 compatible, Vf

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Swagelok compatible

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• Vent/Drain

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6 mm Swagelok compatible,

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%" Swagelok compatible

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1 This product is only available in Asia.

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2 Swagelok is a trademark of Swagelok Co

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Filtration. Separation. Solution.sM

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