Electronics Nylon 6,6 Capsules0 pages
ENM Capsule Filters
Nylon 6,6 Membrane
Applications
UP DI Water
Developers
Chemicals
Solvents
Photoresists
ENM Capsules are hydrophilic and manufactured with the
highest quality Nylon 6,6 membrane. The Nylon 6,6 is capable
of removing particles below the rated micron size, and exhibits
broad chemical compatibility.
ENM capsules are used for critical applications in contamination
control such as final filtration of ultrapure DI water in the water
loop or at the point of use. They are also used for final filtration of
solvents, alcohols, photoresists and other liquids in distribution
systems or in tools.
H
igh efficiency retention ratings with broad chemical
compatibility
Nylon has very low extractables and rinses to high purity very
quickly. It is particularly suited for the filtration of solvents used
in the production of low nanometer geometry products.
Final filtration of UPDI water, resists, solvents
V
ery low extractables; rinses to high purity very quickly
Capsule Length
Media
Nylon 6,6 Membrane
2”
5”
1.0 ft (930cm )
2
2
10”
3.0 ft (2788cm )
2
20”
7.0 ft (6503cm )
2
2
2
30”
14.0 ft (13006cm )
2
2
21.0 ft (19509cm2)
2
Flow Rate / Filtration Area
The following table represents typical water flow at a one psi (69 mbar) pressure differential across a single 2 inch capsule with 1.0 ft²
(930 cm²) of media with 1/2” FNPT ports. The test fluid is water at ambient temperature. Higher pressure drops are acceptable, but as
flows increase the pressure drop of the housing becomes more apparent.
0.10 μm
0.22 μm
0.45 μm
0.65 μm
GPM
0.14
0.25
0.43
0.60
LPM
0.53
0.95
1.63
2.27
Pore Size
* For approximate flow rates for 5” through 30” capsules, refer to the appropriate cartridge data sheet
Construction Materials
Maximum Operating Parameters
Housing
Polypropylene
Liquid Operational Pressure
80 psi (5.5 bar) at 20 °C (68 °F)
Filtration Media
Nylon 6,6 Membrane
Gases Operational Pressure
60 psi (4.1 bar) at 20 °C (68 °F)
Media Support
Polypropylene
Operating Temperature
End Caps
Polypropylene
43 °C (110 °F) at 30 psi
(2.1 bar) in water
Center Core
Polypropylene
Outer Support Cage
Polypropylene
Sealing Method
Thermal Bonding
Forward Differential Pressure 50 psid (3.4 bard) at 20 °C (68 °F)
Reverse Differential Pressure
40 psid (2.7 bard) at 20 °C (68 °F)
Recommended Changeout
Pressure
35 psid (2.4 bard)
Electronics Grade
ENM Capsule Filters - Filtration Area
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