VANTAGE 500 pages

LOGO

P RODUCT

Cost-effective profilometer
and 3D scanning solution
Integrated motion system
with 50 mm travel
User friendly concept
Sophisticated analysis and
automation software

Depth of laser scribing

3D metallization measurement on
solar cells

Overview

The cyberSCAN VANTAGE 50 is a compact, noncontact profiling system for fast scanning of any part
or surface. The system combines a laser sensor, a
base unit with an integrated translation stage and
a PC or a laptop for data analysis. The sensor scans
over the object and produces a high-resolution
height profile. The confocal laser sensor can also
produce a scan line with the width of 1.1 mm and a
lateral resolution of 2 µm. In combination with the
translation stage a highly accurate 3D raster can be
recorded.

Applications

Thick-film height on hybrid circuits

Typical applications are the analysis and quality
control of printing processes, such as thick-film
measurement on a variety of substrate materials,
epoxy-film, dots or other printed and dispensed
features. Geometry measurement of highly
contoured objects like solder bumps, micro-lenses,
and MEMS devices are popular applications for a
VANTAGE 50 system.
t Printed products, systems or devices
t Device packaging
t Printed circuits
t MEMS
t Solar and fuel cell elements
t Soft and transparent materials or coatings

Software

The proprietary cyberTECHNOLOGIES, Windowsbased software package SCAN SUITE combines
system control, data collection and data analysis in
a user friendly interface. Comprehensive profile,
3D and roughness analyses conforming to DIN ISO
are included. The software can handle up to 10.000
x 10.000 data points in one scan.
An outstanding feature is the ASCAN Software:
t Automation of measurement routines
t Easy programming using tasks and templates
t Offset and fiducial correction
t Built-in SPC Charts with reporting function
t Flexible, user defined data output format
t Barcode or user field input
t Step & Repeat function

Technology
t

t Integrated y-stage with sensor mount
t 50 mm travel in y- direction, lateral resolution
0.05 µm
t Laser confocal or triangulation sensors
t Resolution down to 0.01 µm, measurement t
range up to 8 mm
t 3D Line-scan capabilities (laser confocal sensor) t
with 1.1 mm width and 2 µm lateral resolution
t Integrated on-axis camera, visible laser spot t
inside the camera field of view

SLOGAN

BECAUSE ACCURACY MATTERS