MEMpax®0 pages

SCHOTT MEMpax®
Product Information
SCHOTT MEMpax® is a borosilicate glass that is manufactured with fire-polished surfaces. It has similar chemical and
physical characteristics as the well-known product SCHOTT
BOROFLOAT ® 33.
At the same time, MEMpax® is available in much lower thicknesses and offers a thin wafer that no longer needs to be
ground and polished, thanks to its ­ xcellent surface quality.
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®
SCHOTT MEMpax can be put to use anywhere that extremely
thin borosilicate glasses are needed. The coefficient of linear
thermal expansion of MEMpax® corresponds with that of
silicon, therefore this glass is perfectly suited for use in anodic
bonding.
Its low autofluorescence, combined with its excellent surface
quality, flatness and homogeneity, opens up numerous application possibilities for SCHOTT MEMpax® in MEMS and Biotechnology.
Thanks to its low alkali content, MEMpax® acts as a high-quality
insulator. For this reason, MEMpax® is an extremely appropriate
material for applications that require nonconductive characteristics at high temperatures (up to 450 °C).
Applications
MEMS
•t Coefficient of linear thermal expansion
corresponds with that of silicon
•t Suited for anodic bonding
•t Thin wafers without polishing
•t High thermal and chemical resistance

Biotechnology
•t High transmission
•t Available in various thicknesses
•t Low autofluorescence
•t Excellent surface quality

Technical Data
6”, 8” or 12” Wafer

Surface roughness

< 1 nm RMS

Thicknesses

0.1 mm to 1.1 mm

Standard thicknesses

0,2 0,3 0,4 0,5 0,7 mm

Luminous transmittance τvD65 (d = 0.5 mm)

91,7 %

Coefficient of mean linear thermal expansion α (20 °C; 300 °C) (static measurement)

3.25 · 10–6 K–1

Transformation temperature Tg

525 °C

Dielectric constant εr at 1 MHz

4.6

Refractive index nD

1.4714

Density ρ (annealed at 40 °C/h)

2.2 g/cm3
Advanced Optics
SCHOTT AG
Hattenbergstrasse 10
55122 Mainz
Germany
Phone +49 (0)6131/66-1812
Fax +49 (0)3641/2888-9047
info.optics@schott.com
www.schott.com/advanced_optics

Version May 2013

Dimensions