PE-50 XL Plasma Cleaning System0 pages

Plasma Etch
Progress through Innovation

Affordable Benchtop Plasma System

As in all Plasma Etch systems,
a capacitive parallel plate
design is used for the most
effective plasma generation.
Competitive units with glass/
quartz barrel chambers
cannot penetrate the vacuum

1”
8

Pe - 50 XL
The Plasma Etch, Inc. PE-50
XL has all the features as the
PE-50, however it comes with
an 8” w x 9” d x 4”h chamber
for those looking to process
larger applications. This
system is perfect for smaller
production facilities, R&D
facilities and universities.

1’
4’

containment vessel and
therefore are restricted to
inductive coupling using an RF
coil wrapped around the exterior
of the chamber.
The Pe-50 XL has a few optional
features including a 100W @
13.56MHz RF generator and
automatic matching network,
a light bar, or mass flow
controllers for added precision.
The PE-50 is comprised of
components made in the USA
and is built in and supported
from our Carson City, NV

headquarters with some of the
best customer service available
in the industry.

Plasma Etch
Progress through Innovation

3522 Arrowhead Drive
Carson City, NV 89706
775.883.1336

www.PlasmaEtch.com
sales@plasmaetch.com