PE-50 Plasma Cleaner0 pages
Plasma Etch
Progress through Innovation
Affordable Benchtop Plasma System
This system is made for smaller
production facilities, R&D
facilities and universities. The
system features an implosion
proof 6” w x 7” d x 4” h
Rectangular welded Aluminum
Vacuum Chamber and a direct
powered RF electrode.
As in all Plasma Etch systems a
capacitive parallel plate design
is used for the most effective
1”
8
Pe - 50
The Plasma Etch, Inc. PE-50 is
our entry level plasma system
and offers many features not
found in competitive units.
1’
4’
plasma generation. Competitive
units with glass/quartz barrel
chambers cannot penetrate the
vacuum containment vessel and
therefore are restricted to
inductive coupling using an RF
coil wrapped around the exterior
of the chamber.
The PE-50 has a few optional
system features including a mass
flow meter, a light bar, or a
100W @ 13.56MHz RF generator
and automatic mathcing network.
The PE-50 is comprised of
components made in the USA
and is built in and supported
from our Carson City, NV
headquarters with some of the
best customer service available
in the industry.
Plasma Etch
Progress through Innovation
3522 Arrowhead Drive
Carson City, NV 89706
775.883.1336
www.PlasmaEtch.com
sales@plasmaetch.com