Calibre OPCverify0 pages

D A T A S H E E T
www.mentor.com
Key Product Benefits
• Grid-based OPC simulation
eliminates need for user
defined simulation sites,
making setup fast and easy.
• Simulates how a design
will manufacture through
the process window, allowing
users vary RET recipes
and determine best OPC
score for manufacturing of
design.
• Provides accurate wafer
contour simulation for
advanced process conditions,
including immersion litho.
• OPC usage models
supported, including OPC
recipe verification, mask
sign-off, litho-friendly
design, VT5 and optical.
• “Canned” and customizable
scripts for CD errors,
spacing errors, bridging and
pinching checks, and twolayer
checks.
• Results output can be
customized and integrated to
the user’s flow.
• Supported by the Calibre
platform and hierarchical
polygon processing engine.
Calibre OPCverify
Calibre OPCverify: New grid-based simulation enables
“virtual manufacturing” for 65 nanometer and below
Current low k1 photolithography processes are increasing the complexity
of resolution enhancement technology (RET) applications in nanometer
designs. This has resulted in higher silicon failure rates caused by mask rule
constraints, fragmentation, modeling and metrology errors, and more. To
reduce errors, a post-OPC verification step is needed to detect failures
before a design is sent to the mask or wafer manufacturer. Calibre®
OPCverify “overlays” a virtual grid on the design to measure every element
and contour, not just edges, providing critical failure detection and full
process window prediction.
Results ouput can be customized and integrated to the user’s flow. Calibre
OPCverify enables a “virtual manufacturing” lithography simulation to
determine pattern transfer accuracy.
Users can simulate on demand,
combine duplicate errors, attach
image properties to error markers,
prioritize and classify errors as
desired, and much more. The GUI is
Tcl/Tk-based for easy customization.
OPCverify is integrated with
Calibre WORKbench for result
analysis and failure processing.
Manufacturability
Calibre
OPCverify
Verification center
interface provides
users with
comprehensive
error analysis
capabilites.