MEMS Devices0 pages

LASERS & MATERIAL PROCESSING I OPTICAL SYSTEMS I INDUSTRIAL METROLOGY I TRAFFIC SOLUTIONS I DEFENSE & CIVIL SYSTEMS

Customer specific MEMS Devices

Jenoptik has the knowledge and tools to perform t
detailed design and analysis for a variety of micro-t
electro-mechanical systems (MEMS) devices.
An important MEMS technology that can be used in
many industries is the scanning two-axis tilt mirror.
There are several major benefits of JENOPTIK tilt mirrors.
First, the electrostatically generated tilt angle is analog
as opposed to “on-off”.
Second, most competing products have holes in the
mirror surface as a result of processing requirements,
Jenoptik devices have no holes in the mirror surface, t
allowing for a better reflection of all incident light.
Finally, low voltages are required for actuation, a total t
of less than 70 volts is required for the full 3 degrees of
tilt with less voltage is required for less tilt deflection.

Features:
•t Full 360° of rotation
• tUp to 3° tilt angle
• tSurface free of (release) holes
• tLow voltages required for actuation
Applications:
•t Tunable attenuators
• tSpatial light modulators
• tOptical switches
• tLasers communication systems

Microoptics