Cropping machine 72/4540 pages

ARNOLD

GRUPPE

I IU

— SINCE 1950

72 454

OD CROPPING MACHINE

/ 1 . .

This machine is suitable for cutting squared and as grown mono crystalline silicon work

pieces with a length of 1.200 up to 3.000 mm. The Maximal diameter of ingot is 230 mm,

the cut off length is between 200 mm up to 1020mm.

■ equipped for fully automatic cropping process of complete ingot that means, auto-

matic feed in of ingot, positioning and cutting of top/tail, slug(s) and segments and

unloading without manual interference.

■ thin blade water hydraulic guidance for thin diamond cutting discs

kerf loss < 1.7 mm

■ compact design

■ high machine availability 97% acc. to SEMI E10

■ very low tool costs wheel life time between 12.000 and 15.000 cuts

■ high process stability

■ low investment costs

■ cutting force control for an optimized cutting process and to avoid tool damages

■ Integrated vacuum chuck for top/tail and slug cut.

Specifications:

■ arithmetical surface roughness Ra <= 0,8 um

■ average surface roughness Rz <= 8 um

■ angle accuravy 90°+/-0,l° (by square work piece)

Throuhgput:

■ cycle time <= 90 Minuten per ingot (incl. loading, unloading)

■ 6 cuts per ingot

■ ingots as grown lenght 2400 mm

■ usable ingot length 2000 mm, average segement lenght 500 mm

■ 5 cuts for segments & 1 slug (test wafer) cut

info@arnold-gruppe.de ■ www.arnold-gruppe.de