FLOW-SMS0 pages
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nnnnFLOW-SMS
nnnnSurface Mount System for
nnnnMass Flow / Pressure Meters and Controllers
nnnn> Introduction
nnnnBrankhorst High-Tech B.V., the European market leader in
nnnnThermal Mass Flow Meters/Controllers and Electronic Pressure
nnnnControllers, has many years of experience in designing and
nnnnmanufacturing precise and reliable measurement and control
nnnndevices. With a wide range of instruments, Brankhorst High-Tech
nnnnoffers innovative solutions for many different applications in
nnnna variety of different markets.
nnnn> FLOW-SMS series, compact assemblies
nnnnof functional modules
nnnnBrankhorst High-Tech developed the FLOW-SMS series for
nnnncustomers who are looking for process gas panels with
nnnnoptimal space efficiency. On a compact, lightweight but still
nnnnrugged mounting rail system one or more mass flow or pressure
nnnnsensor modules can be combined with control valves, shut-off valves,
nnnnmixing chambers, filters or any other functional module as per
nnnncustomer's request. The modular concept of the FLOW-SMS system
nnnnoffers great flexibility for the end-user with respect to modifications
nnnnand serviceability. The functional modules are 'top-mount', so they
nnnncan easily be exchanged without removing the total assembly.
nnnnThe ranges for the flow meters and controllers can be selected
nnnnbetween apprax. 5 mln/min up to 50 ln/min or even higher. In case a
nnnnpressure meter or controller is included, the pressure range can be
nnnnchosen between 0-100 mbar and 0-10 bar absolute or gauge.
nnnnDepending on the application the customer may prefer a system
nnnnwith compression type couplings, face seal fittings or flanges according
nnnnto customers' specification. On request, the system will be assembled,
nnnntested, and packaged in a cleanraom.
nnnn> Fields of application
nnnnThe FLOW-SMS Series has great potential in many different
nnnnmarkets, for instance in:
nnnn► Vacuum, plasma, sputter and coating processes
nnnnCatalytical test benches
nnnn► Semiconductor and solar cell fabrication
nnnn► Burner control (welding)
nnnn► Biotechnological and chemical installations
nnnn► Food and beverage processes
nnnn> FLOW-SMS features
nnnn► Compact assembly ensures space efficiency and
nnnnminimized dead volume
nnnn► Economical solution, low cost of ownership
nnnn► Tubeless construction reduces potential leak points
nnnn► Service friendly; easily accessible from the top
nnnn► Great flexibility regarding system extension or modification
nnnn► Pre-tested "Plug and Work" units, reducing custom testing
nnnnrequirements
nnnn> Digital features
nnnn► Analog or digital communication (RS232, DeviceNet™,
nnnnPROFIBUS3, Modbus, EtherCAT3, FLOW-BUS)
nnnnAlarm and counter functions
nnnn► Control characteristics user-configurable
nnnn► Optional Multi Gas / Multi Range functionality
nnnn► Free software tools
nnnno>
nnnnBronkhorst
nnnnHIGH-TECH
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