mini CORI-FLOW ML120 Coriols Mass Flow Meters/Controllers for (ultra) low flow ranges0 pages

WORLD’S

SMALLEST

LOW FLOW

CORIOLIS

INSTRUMENTS

mini CORI-FLOW
Series ML120

TM

(Ultra) Low Flow Coriolis Mass Flow Meters / Controllers

Introduction
mini CORI-FLOW™ series by Bronkhorst® are precise and compact Mass
Flow Meters and Controllers, based on the Coriolis measuring principle.
Designed to cover the needs of the (ultra) low flow market, there is
a range of models to overlap flow ranges from 5 g/h up to 300 kg/h
(full scale values), each offering “multi-range” functionality: factory
calibrated ranges can be rescaled by the user, maintaining the original
accuracy specs. As a result of this, customers are able to reduce the
variety of instruments and thus reduce the cost of ownership.

Superior Coriolis flow sensor
Instruments of the mini CORI-FLOW™ series contain a uniquely shaped,
single loop sensor tube, forming part of an oscillating system,
providing superior flow measurement performance. When a fluid flows
through the tube, Coriolis forces cause a variable phase shift, which
is detected by sensors and fed into the integrally mounted pc-board.
The resulting output signal is strictly proportional to the real mass flow
rate. Coriolis mass flow measurement is fast, accurate, easy to install
and inherently bi-directional. The mini CORI-FLOW™ features density and
temperature of the fluid as secondary outputs.

mini CORI-FLOW™ Series ML120t
Bronkhorst® designed the new ML120 to offer highest performance at
the world’s lowest flow rates to be measured with a Coriolis
instrument: from 0,05…5 g/h up to 2…200 g/h. The ML120, comprising
both a Mass Flow Meter (MFM) and a Mass Flow Controller (MFC),
feature smallest physical dimensions and lowest internal volume. The
new Coriolis sensor shows little to no variance over a long period of
operation, thus reducing the system downtime. The MFC contains a
microprocessor based pc-board with signal and fieldbus conversion
and a PID controller for mass flow control by means of the integrated
piezoelectric control valve. The flow controller only requires (less than)
1 second settling time. This makes the Coriolis MFC an ideal device for
fast, repetitive dosing and filling processes for precursors, additives,
solvents, etc.

Fields of applicationt
Applications can be found in compound semiconductor processing,
in solar cell and FPD technology, in food and pharmaceutical
industries, in medical, microchemical or analytical installations, in
calibration laboratories, amongst many others.

Features of the Coriolis principle
>tDirect mass flow measurement, independent of fluid properties
>tFast response
> tHigh accuracy
>tAdditional density and temperature outputs
>tBi-directional measurement

Benefits of the ML120
>t owest flow ranges on the market (Coriolis principle):
L
from 50 mg/h up to 200 g/h
>tVery small internal volume
>tCompact, space saving design
>tEasy to install (low risk of gas bubble inclusion)
>tIntegrated digital controller for accurate flow or batch delivery
>tExcellent repeatability and long-term stability
>tMulti-range: easy on site re-ranging via digital interface
>tFieldbus connection options:
t EtherCAT®, Modbus, DeviceNet™, PROFIBUS DP, FLOW-BUS, PROFINET
>tSaves expensive fluids at repetitive dosing and filling processes
>tReduced downtime: no recalibration required after fluid change
>tNo periodical recalibration required