0220 pages
Transfer valve/insert MONOVAT
nnnn>*Vr Series 02/03
nnnnFor SEMI applications handling
nnnn200, 300 and 450 mm wafers
nnnnFor load lock / process module isolation
nnnnVirtually particle and vibration-free
nnnn>5 million cycles between maintenance
nnnnVery easy maintenance
nnnnthanks to self-adjusting plate
nnnnBody material
nnnnaluminum or stainless steel
nnnnValve
nnnnSeries 022
nnnndouble acting
nnnnpneumatic actuator
nnnnwith position indicator
nnnnSEMI E21-94
nnnnSEMI E21-94
nnnnSEMI E21.1-1296
nnnnInsert
nnnnSeries 032
nnnndouble acting
nnnnpneumatic actuator SEMI E21-94
nnnnwith position indicator SEMI E21-94
nnnnSEMI E21.1-1296
nnnnDN ( mm | D1 X D) inch | Ordering type B opening: rear side > seat side with bonnet flange | numbers type A opening: rear side = seat side with bonnet flange | ||
aluminum | stainless steel | aluminum | stainless steel | ||
32 X 222 | 1.26 X 8.74 | 02209-BA24 | 02209-BE24 | 02209-AA24 | 02209-AE24 |
46 X 236 | 1.81 X 9.29 | 02210-BA24 | 02210-BE24 | 02210-AA24 | 02210-AE24 |
50x336 | 1.97 X 13.23 | 02212-BA24 | 02212-BE24 | 02212-AA24 | 02212-AE24 |
56 X 496 | 2.20 X 19.53 | 02213-BA24 | 02213-BE24 | 02213-AA24 | 02213-AE24 |
with solenoid for impulse actuation: 022 . . -. . 44 (specify control voltage)
nnnnOther opening sizes: see «Options»
nnnnDN ( mm | D1 X D) inch | Ordering numbers type C | |
aluminum | stainless steel | ||
32 X 222 | 1.26 X 8.74 | 03209-CA24 | 03209-CE24 |
46 X 236 | 1.81 X 9.29 | 03210-CA24 | 03210-CE24 |
50x336 | 1.97 X 13.23 | 03212-CA24 | 03212-CE24 |
56 X 496 | 2.20 X 19.53 | 03213-CA24 | 03213-CE24 |
with solenoid for impulse actuation: 032 . . -. . 44 (specify control voltage)
nnnnOther opening sizes and insert types: see «Options»
nnnn126
nnnnK12 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 www.vatvalve.com
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