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Transfer valve MONOVAT direct0 pages
Transfer valve / insert MONOVAT
Series 02/03
For SEMI applications handling
200, 300 and 450 mm wafers
For load lock / process module isolation
Virtually particle and vibration-free
> 5 million cycles between maintenance
Very easy maintenance
thanks to self-adjusting plate
Body material
aluminum or stainless steel
Valve
Series 022
DN (D1 x D)
Ordering numbers
type B
double acting
pneumatic actuator
with position indicator
mm
inch
type A
opening:
rear side > seat side
opening:
rear side = seat side
with bonnet flange
with bonnet flange
aluminum
stainless steel
aluminum
stainless steel
SEMIt E21-94
32 x 222 t 1.26t xt 8.74
02209-BA24
02209-BE24
02209-AA24
02209-AE24
SEMIt E21-94
46 x 236 t 1.81t xt 9.29
02210-BA24
02210-BE24
02210-AA24
02210-AE24
SEMIt E21.1-1296
50 x 336 t 1.97t xt 13.23
02212-BA24
02212-BE24
02212-AA24
02212-AE24
56 x 496 t 2.20t xt 19.53
02213-BA24
02213-BE24
02213-AA24
02213-AE24
with solenoid for impulse actuation: 022 . . - . . 44 (specify control voltage)
Other opening sizes: see «Options»
Insert
Series 032
double acting
pneumatic actuator
with position indicator
DN (D1 x D)
mm
Ordering numbers
type C
inch
aluminum
stainless steel
SEMIt E21-94
32 x 222 t 1.26t xt 8.74
03209-CA24
03209-CE24
SEMIt E21-94
46 x 236 t 1.81t xt 9.29
03210-CA24
03210-CE24
SEMIt E21.1-1296
50 x 336 t 1.97t xt 13.23
03212-CA24
03212-CE24
56 x 496 t 2.20t xt 19.53
03213-CA24
03213-CE24
with solenoid for impulse actuation: 032 . . - . . 44 (specify control voltage)
Other opening sizes and insert types: see «Options»
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K12 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 www.vatvalve.com
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