High load piezo positioner series nanoX 2000 pages

rs piezosyszemjena

SJ incredibly precise

I nanoX 200 series

High speed piezo translation stages

concept:

The one-axis linear positioning stages nanoX

200 are a development within the ultra-fast

nanoX®-line. Due to FEA-optimization these

stages achieve the highest dynamical per-

formance and excellent guiding accuracy

even under high loads.

The positioning stages of the nanoX 200

series are temperature compensated - while

changing the environmental temperature the

stage keeps its position.

specials:

The highest positioning accuracy, stability,

linearity and reproducibility are achieved in

closed loop operation when used in combi-

nation with the high resolution capacitive

direct measuring feedback system from

piezosystem jena.

mounting:

The raster tapped and thru holes allow easy

integration of the stage into any application

or mechanical setup.

image: nanoX 200

product highlights:

• 240|am range of motion

• highest dynamical performance

• excellent guidance accuracy

• 0.4 nm resolution

• 0 3mm central aperture

• vacuum and cryogenic versions available

• body material variations of invar,

superinvar, aluminium or titanium available

• external sensor preamplifier optional

applications:

• machine tools

• laser optics

• life science

• scanning systems

Tel: +49 (3641) 66880 • Fax: +49 (3641) 668866

info@piezojena.com • http://www.piezosystem.de

nanoX 200 ds Rev05 2013 10 24.doc